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Enhancing Contrast and Resolution for Electron-beam Lithography on Insulating Substrates

Fuente: arXiv

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Bibliographic Details
Main Authors:	Kumar, Deepak, Meyers, Cooper, Smith, RJ, Hastings, J. Todd
Format:	Preprint
Published:	2025
Subjects:	Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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