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Direct integration of atomic precision advanced manufacturing into middle-of-line silicon fabrication

Fuente: arXiv

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Bibliographic Details
Main Authors:	Anderson, E. M., Allemang, C. R., Leenheer, A. J., Schmucker, S. W., Ivie, J. A., Campbell, D. M., Lepkowski, W., Gao, X., Lu, P., Arose, C., Lu, T. -M., Halsey, C., England, T. D., Ward, D. R., Scrymgeour, D. A., Misra, S.
Format:	Preprint
Published:	2025
Subjects:	Applied Physics Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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