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Nanoscale Mechanical Structures Fabricated from Silicon-on-Insulator Substrates

Fuente: arXiv

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Bibliographic Details
Main Authors:	Cleland, Andrew N., Roukes, Michael L.
Format:	Preprint
Published:	2025
Subjects:	Mesoscale and Nanoscale Physics Quantum Physics
Online Access:	Acceder al recurso
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