Copper Damascene Process-Based High-Performance Thin Film Lithium Tantalate Modulators
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arXiv
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| Main Authors: | Lin, Mengxin, Li, Zihan, Kotz, Alexander, Larocque, Hugo, Riemensberger, Johann, Koos, Christian, Kippenberg, Tobias J. |
|---|---|
| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | |
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