Compensated LGAD optimisation through van der Pauw test structures

Fuente: arXiv
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Auteurs principaux: Fondacci, Alessandro, Croci, Tommaso, Passeri, Daniele, Arcidiacono, Roberta, Cartiglia, Nicolò, Ferrero, Marco, Vignali, Matteo Centis, Boscardin, Maurizio, Paternoster, Giovanni, White, Robert Stephen, Altamura, Anna Rita, Sola, Valentina, Morozzi, Arianna, Moscatelli, Francesco
Format: Preprint
Publié: 2025
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author Fondacci, Alessandro
Croci, Tommaso
Passeri, Daniele
Arcidiacono, Roberta
Cartiglia, Nicolò
Ferrero, Marco
Vignali, Matteo Centis
Boscardin, Maurizio
Paternoster, Giovanni
White, Robert Stephen
Altamura, Anna Rita
Sola, Valentina
Morozzi, Arianna
Moscatelli, Francesco
author_facet Fondacci, Alessandro
Croci, Tommaso
Passeri, Daniele
Arcidiacono, Roberta
Cartiglia, Nicolò
Ferrero, Marco
Vignali, Matteo Centis
Boscardin, Maurizio
Paternoster, Giovanni
White, Robert Stephen
Altamura, Anna Rita
Sola, Valentina
Morozzi, Arianna
Moscatelli, Francesco
contents A new gain implant design has recently been introduced to enhance the radiation resistance of low-gain avalanche diodes (LGADs) to the extreme fluences anticipated in future hadron colliders like FCC-hh. This design utilises an engineered compensation of two opposing types of doping implants, requiring a thorough analysis of their evolution due to irradiation. To this end, the experimental measurements of their initial test structures have been compared with Technology CAD simulations both before and after irradiation. From the measurement-simulation comparison regarding C-V characteristics, the donor removal at high initial donor concentrations ($>10^{16}$ at/cm$^3$) used in Compensated LGADs has been studied, along with how donor co-implantation influences the beneficial effect of carbon to slow acceptor removal. Furthermore, an innovative application of van der Pauw test structures, typically employed by foundries to monitor process quality, has been implemented. The doping removal of the single implants used in Compensated LGADs has been estimated by examining the variation in sheet resistance with irradiation through these structures.
format Preprint
id arxiv_https___arxiv_org_abs_2505_05632
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Compensated LGAD optimisation through van der Pauw test structures
Fondacci, Alessandro
Croci, Tommaso
Passeri, Daniele
Arcidiacono, Roberta
Cartiglia, Nicolò
Ferrero, Marco
Vignali, Matteo Centis
Boscardin, Maurizio
Paternoster, Giovanni
White, Robert Stephen
Altamura, Anna Rita
Sola, Valentina
Morozzi, Arianna
Moscatelli, Francesco
Instrumentation and Detectors
A new gain implant design has recently been introduced to enhance the radiation resistance of low-gain avalanche diodes (LGADs) to the extreme fluences anticipated in future hadron colliders like FCC-hh. This design utilises an engineered compensation of two opposing types of doping implants, requiring a thorough analysis of their evolution due to irradiation. To this end, the experimental measurements of their initial test structures have been compared with Technology CAD simulations both before and after irradiation. From the measurement-simulation comparison regarding C-V characteristics, the donor removal at high initial donor concentrations ($>10^{16}$ at/cm$^3$) used in Compensated LGADs has been studied, along with how donor co-implantation influences the beneficial effect of carbon to slow acceptor removal. Furthermore, an innovative application of van der Pauw test structures, typically employed by foundries to monitor process quality, has been implemented. The doping removal of the single implants used in Compensated LGADs has been estimated by examining the variation in sheet resistance with irradiation through these structures.
title Compensated LGAD optimisation through van der Pauw test structures
topic Instrumentation and Detectors
url https://arxiv.org/abs/2505.05632