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Nitrogen and oxygen transport and reactions during plasma nitridation of zirconium thin films

Fuente: arXiv

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Bibliographic Details
Main Authors:	Pichon, Luc, Straboni, A., Girardeau, T., Drouet, M., Widmayer, P.
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
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