Defect Detection in Photolithographic Patterns Using Deep Learning Models Trained on Synthetic Data

Fuente: arXiv

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Bibliographic Details
Main Authors:	Shinde, Prashant P., Pai, Priyadarshini P., Adiga, Shashishekar P., Mayya, K. Subramanya, Seo, Yongbeom, Hwang, Myungsoo, Go, Heeyoung, Park, Changmin
Format:	Preprint
Published:	2025
Subjects:	Machine Learning
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2505.10192