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Defect Detection in Photolithographic Patterns Using Deep Learning Models Trained on Synthetic Data

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Shinde, Prashant P., Pai, Priyadarshini P., Adiga, Shashishekar P., Mayya, K. Subramanya, Seo, Yongbeom, Hwang, Myungsoo, Go, Heeyoung, Park, Changmin
Formato:	Preprint
Publicado:	2025
Materias:	Machine Learning
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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