Low-loss Sb$_2$S$_3$ Optical Phase Shifter Enabled by Optimizing Sputtering Conditions
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arXiv
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| Autores principales: | , , , , , , , , |
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| Formato: | Preprint |
| Publicado: |
2025
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| _version_ | 1866910950085361664 |
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| author | Miyatake, Yuto Anda, Tomohiro Wakita, Yosuke Makino, Kotaro Hatayama, Shogo Okano, Makoto Toprasertpong, Kasidit Takagi, Shinichi Takenaka, Mitsuru |
| author_facet | Miyatake, Yuto Anda, Tomohiro Wakita, Yosuke Makino, Kotaro Hatayama, Shogo Okano, Makoto Toprasertpong, Kasidit Takagi, Shinichi Takenaka, Mitsuru |
| contents | By quantitatively evaluating the atomic concentrations of sputtered Sb$_2$S$_3$ films with different sputtering powers and Ar flows, we reveal that a sputtered Sb$_2$S$_3$ film becomes close to the stoichiometric composition as the sputtering power and Ar flow decrease. We characterize the optical properties of Sb$_2$S$_3$ and show that the lower sputtering power leads to a better figure of merit of Sb$_2$S$_3$ as an optical phase shifter in the near infrared (NIR) range. Based on these results, we achieve a loss per phase shift of 0.33 dB/$π$ at a wavelength of 1.55 $μ$m, one of the lowest losses among Sb$_2$S$_3$ phase shifters in the NIR range. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2505_10752 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Low-loss Sb$_2$S$_3$ Optical Phase Shifter Enabled by Optimizing Sputtering Conditions Miyatake, Yuto Anda, Tomohiro Wakita, Yosuke Makino, Kotaro Hatayama, Shogo Okano, Makoto Toprasertpong, Kasidit Takagi, Shinichi Takenaka, Mitsuru Optics Applied Physics By quantitatively evaluating the atomic concentrations of sputtered Sb$_2$S$_3$ films with different sputtering powers and Ar flows, we reveal that a sputtered Sb$_2$S$_3$ film becomes close to the stoichiometric composition as the sputtering power and Ar flow decrease. We characterize the optical properties of Sb$_2$S$_3$ and show that the lower sputtering power leads to a better figure of merit of Sb$_2$S$_3$ as an optical phase shifter in the near infrared (NIR) range. Based on these results, we achieve a loss per phase shift of 0.33 dB/$π$ at a wavelength of 1.55 $μ$m, one of the lowest losses among Sb$_2$S$_3$ phase shifters in the NIR range. |
| title | Low-loss Sb$_2$S$_3$ Optical Phase Shifter Enabled by Optimizing Sputtering Conditions |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2505.10752 |