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Bibliographic Details
Main Authors: Dou, Zhenxing, Wang, Yijiao, Zou, Tao, Chen, Zhiwei, Liu, Fei, Wang, Peng, Zhao, Weisheng
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2505.11523
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Table of Contents:
  • In recent years, machine learning has been extensively applied to data prediction during process ramp-up, with a particular focus on transistor characteristics for circuit design and manufacture. However, capturing the nonlinear current response across multiple operating regions remains a challenge for neural networks. To address such challenge, a novel machine learning framework, PRIME (Physics-Related Intelligent Mixture of Experts), is proposed to capture and integrate complex regional characteristics. In essence, our framework incorporates physics-based knowledge with data-driven intelligence. By leveraging a dynamic weighting mechanism in its gating network, PRIME adaptively activates the suitable expert model based on distinct input data features. Extensive evaluations are conducted on various gate-all-around (GAA) structures to examine the effectiveness of PRIME and considerable improvements (60\%-84\%) in prediction accuracy are shown over state-of-the-art models.