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Main Authors: Kumar, Vivek, Jangid, Abhishek, Sharma, Manas, Verma, Manvi, Pasyanthi, Jampala, Kumar, Keerthana S, Sharma, Piyush, Chiglintsev, Emil O., Panin, Mikhail I., Punnathanam, Sudeep N., Chernov, Alexander I., Rajan, Ananth Govind, Singh, Akshay
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2505.16627
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author Kumar, Vivek
Jangid, Abhishek
Sharma, Manas
Verma, Manvi
Pasyanthi, Jampala
Kumar, Keerthana S
Sharma, Piyush
Chiglintsev, Emil O.
Panin, Mikhail I.
Punnathanam, Sudeep N.
Chernov, Alexander I.
Rajan, Ananth Govind
Singh, Akshay
author_facet Kumar, Vivek
Jangid, Abhishek
Sharma, Manas
Verma, Manvi
Pasyanthi, Jampala
Kumar, Keerthana S
Sharma, Piyush
Chiglintsev, Emil O.
Panin, Mikhail I.
Punnathanam, Sudeep N.
Chernov, Alexander I.
Rajan, Ananth Govind
Singh, Akshay
contents Two-dimensional magnetic materials (2D-MM) are an exciting playground for fundamental research, and for spintronics and quantum sensing. However, their large-grain large-area synthesis using scalable vapour deposition methods is still an unsolved challenge. Here, we develop a tailored approach for centimetre-scale growth of semiconducting 2D-MM CrCl3 films on mica substrate, via physical vapour transport deposition. A controlled synthesis protocol, enabled via innovations concerning light management, very-high carrier-gas flow, precursor flux, and oxygen/moisture removal, is critical for wafer-scale growth. Optical, stoichiometric, structural, and magnetic characterization identify crystalline, phase-pure 2D-MM CrCl3. Substrate temperature tunes thickness of films from few-layers to tens of nanometres. Further, selective-area growth and large-area transfer are demonstrated. Substrate-dependent growth features are explained by density functional theory and state-of-the-art machine learning interatomic potential-based atomic-scale simulations. This scalable vapour deposition approach can be applied for growth of several 2D-MM, and low growth temperature (~500 C) will enable creation of hybrid heterostructures.
format Preprint
id arxiv_https___arxiv_org_abs_2505_16627
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Tailored Vapor Deposition Unlocks Large-Grain, Wafer-Scale Epitaxial Growth of 2D Magnetic CrCl3
Kumar, Vivek
Jangid, Abhishek
Sharma, Manas
Verma, Manvi
Pasyanthi, Jampala
Kumar, Keerthana S
Sharma, Piyush
Chiglintsev, Emil O.
Panin, Mikhail I.
Punnathanam, Sudeep N.
Chernov, Alexander I.
Rajan, Ananth Govind
Singh, Akshay
Materials Science
Mesoscale and Nanoscale Physics
Two-dimensional magnetic materials (2D-MM) are an exciting playground for fundamental research, and for spintronics and quantum sensing. However, their large-grain large-area synthesis using scalable vapour deposition methods is still an unsolved challenge. Here, we develop a tailored approach for centimetre-scale growth of semiconducting 2D-MM CrCl3 films on mica substrate, via physical vapour transport deposition. A controlled synthesis protocol, enabled via innovations concerning light management, very-high carrier-gas flow, precursor flux, and oxygen/moisture removal, is critical for wafer-scale growth. Optical, stoichiometric, structural, and magnetic characterization identify crystalline, phase-pure 2D-MM CrCl3. Substrate temperature tunes thickness of films from few-layers to tens of nanometres. Further, selective-area growth and large-area transfer are demonstrated. Substrate-dependent growth features are explained by density functional theory and state-of-the-art machine learning interatomic potential-based atomic-scale simulations. This scalable vapour deposition approach can be applied for growth of several 2D-MM, and low growth temperature (~500 C) will enable creation of hybrid heterostructures.
title Tailored Vapor Deposition Unlocks Large-Grain, Wafer-Scale Epitaxial Growth of 2D Magnetic CrCl3
topic Materials Science
Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2505.16627