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Main Authors: Poblet, Martin, Bertelsen, Christian Vinther, Alonso-Tomas, David, Singh, Rahul, Lopez-Aymerich, Elena, Goldschmidt, Jens, Schmitt, Katrin, Dimaki, Maria, Svendsen, Winnie E., Romano-Rodriguez, Albert, Navarro-Urrios, Daniel
Format: Preprint
Published: 2025
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Online Access:https://arxiv.org/abs/2505.17822
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author Poblet, Martin
Bertelsen, Christian Vinther
Alonso-Tomas, David
Singh, Rahul
Lopez-Aymerich, Elena
Goldschmidt, Jens
Schmitt, Katrin
Dimaki, Maria
Svendsen, Winnie E.
Romano-Rodriguez, Albert
Navarro-Urrios, Daniel
author_facet Poblet, Martin
Bertelsen, Christian Vinther
Alonso-Tomas, David
Singh, Rahul
Lopez-Aymerich, Elena
Goldschmidt, Jens
Schmitt, Katrin
Dimaki, Maria
Svendsen, Winnie E.
Romano-Rodriguez, Albert
Navarro-Urrios, Daniel
contents One-dimensional photonic crystal (1D-PhC) pillar cavities allow transducing mechanical pillar vibrations to the optical domain, thereby relaxing the requirements typically associated with mechanical motion detection. In this study, we integrate these geometries into a silicon-on-insulator photonics platform and explore their optical and mechanical properties. The 1D-PhC structures consist of a linear array of high aspect ratio nanopillars with nanometer-sized diameters, designed to enhance the interaction between transverse-magnetic (TM) polarized optical fields and mechanical vibrations and to minimize optical leaking to the substrate. Integrated waveguides are engineered to support TM-like modes, which enable optimized coupling to the 1D-PhC optical cavity modes via evanescent wave interaction. Finite element method simulations and experimental analyses reveal that these cavities achieve relatively high optical quality factors (Q = 4x10^3). In addition, both simulated and experimentally measured mechanical vibrational frequencies show large optomechanical coupling rates exceeding 1 MHz for the fundamental cantilever-like modes. By tuning the separation between the 1D-PhC and the waveguide, we achieve optimal optical coupling conditions that enable the transduction of thermally activated mechanical modes across a broad frequency range (from tens to several hundreds of MHz). This enhanced accessibility and efficiency in mechanical motion transduction significantly strengthens the viability of established microelectromechanical (MEMS) and nanoelectromechanical systems (NEMS) technologies based on nanowires, nanorods, and related structures, particularly in applications such as force sensing and biosensing.
format Preprint
id arxiv_https___arxiv_org_abs_2505_17822
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Hybrid SiO2/Si Pillar-Based Optomechanical Crystals for On-Chip Photonic Integration
Poblet, Martin
Bertelsen, Christian Vinther
Alonso-Tomas, David
Singh, Rahul
Lopez-Aymerich, Elena
Goldschmidt, Jens
Schmitt, Katrin
Dimaki, Maria
Svendsen, Winnie E.
Romano-Rodriguez, Albert
Navarro-Urrios, Daniel
Optics
One-dimensional photonic crystal (1D-PhC) pillar cavities allow transducing mechanical pillar vibrations to the optical domain, thereby relaxing the requirements typically associated with mechanical motion detection. In this study, we integrate these geometries into a silicon-on-insulator photonics platform and explore their optical and mechanical properties. The 1D-PhC structures consist of a linear array of high aspect ratio nanopillars with nanometer-sized diameters, designed to enhance the interaction between transverse-magnetic (TM) polarized optical fields and mechanical vibrations and to minimize optical leaking to the substrate. Integrated waveguides are engineered to support TM-like modes, which enable optimized coupling to the 1D-PhC optical cavity modes via evanescent wave interaction. Finite element method simulations and experimental analyses reveal that these cavities achieve relatively high optical quality factors (Q = 4x10^3). In addition, both simulated and experimentally measured mechanical vibrational frequencies show large optomechanical coupling rates exceeding 1 MHz for the fundamental cantilever-like modes. By tuning the separation between the 1D-PhC and the waveguide, we achieve optimal optical coupling conditions that enable the transduction of thermally activated mechanical modes across a broad frequency range (from tens to several hundreds of MHz). This enhanced accessibility and efficiency in mechanical motion transduction significantly strengthens the viability of established microelectromechanical (MEMS) and nanoelectromechanical systems (NEMS) technologies based on nanowires, nanorods, and related structures, particularly in applications such as force sensing and biosensing.
title Hybrid SiO2/Si Pillar-Based Optomechanical Crystals for On-Chip Photonic Integration
topic Optics
url https://arxiv.org/abs/2505.17822