Khodapanahandeh, M., Zolfaghari, P., & Urey, H. (2025). 2D PZT MEMS Resonant Scanner Using a Three-Mask Process.
Chicago Style (17th ed.) CitationKhodapanahandeh, Mehrdad, Parviz Zolfaghari, and Hakan Urey. 2D PZT MEMS Resonant Scanner Using a Three-Mask Process. 2025.
MLA (9th ed.) CitationKhodapanahandeh, Mehrdad, et al. 2D PZT MEMS Resonant Scanner Using a Three-Mask Process. 2025.
Warning: These citations may not always be 100% accurate.