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Main Authors: Klimchitskaya, G. L., Korotkov, A. S., Loboda, V. V., Mostepanenko, V. M.
Format: Preprint
Published: 2025
Subjects:
Online Access:https://arxiv.org/abs/2506.00179
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author Klimchitskaya, G. L.
Korotkov, A. S.
Loboda, V. V.
Mostepanenko, V. M.
author_facet Klimchitskaya, G. L.
Korotkov, A. S.
Loboda, V. V.
Mostepanenko, V. M.
contents The stability of nanoelectromechanical pressure sensors working in the Casimir regime is considered with account of surface roughness on both the sensor membrane and the ground plate. The equilibrium positions of the sensor membrane are found from the balance between the external measured, elastic, electric pressures, and the Casimir pressure computed by means of the Lifshitz theory. It is shown that the stable equilibrium position of the sensor membrane is nearly independent of the surface roughness, whereas its unstable equilibrium position is shifted to larger membrane-plate separations. The use of these results for creatign pressure sensors with further shrinked dimensions is discussed.
format Preprint
id arxiv_https___arxiv_org_abs_2506_00179
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Impact of surface roughness on the stability of nanoelectromechanical pressure sensors in the Casimir regime
Klimchitskaya, G. L.
Korotkov, A. S.
Loboda, V. V.
Mostepanenko, V. M.
Quantum Physics
The stability of nanoelectromechanical pressure sensors working in the Casimir regime is considered with account of surface roughness on both the sensor membrane and the ground plate. The equilibrium positions of the sensor membrane are found from the balance between the external measured, elastic, electric pressures, and the Casimir pressure computed by means of the Lifshitz theory. It is shown that the stable equilibrium position of the sensor membrane is nearly independent of the surface roughness, whereas its unstable equilibrium position is shifted to larger membrane-plate separations. The use of these results for creatign pressure sensors with further shrinked dimensions is discussed.
title Impact of surface roughness on the stability of nanoelectromechanical pressure sensors in the Casimir regime
topic Quantum Physics
url https://arxiv.org/abs/2506.00179