Substrate pre-sputtering for layer-by-layer van der Waals epitaxy of 2D materials

Fuente: arXiv
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Main Authors: Rajan, A., Ramirez, M., Kushwaha, N., Buchberger, S., McLaren, M., King, P. D. C.
Format: Preprint
Published: 2025
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author Rajan, A.
Ramirez, M.
Kushwaha, N.
Buchberger, S.
McLaren, M.
King, P. D. C.
author_facet Rajan, A.
Ramirez, M.
Kushwaha, N.
Buchberger, S.
McLaren, M.
King, P. D. C.
contents Two-dimensional transition metal chalcogenides, with their atomically layered structure, favourable electronic and mechanical properties, and often strong spin-orbit coupling, are ideal systems for fundamental studies and for applications ranging from spintronics to optoelectronics. Their bottom-up synthesis via epitaxial techniques such as molecular-beam epitaxy (MBE) has, however, proved challenging. Here, we develop a simple substrate pre-treatment process utilising exposure to a low-energy noble gas plasma. We show how this dramatically enhances nucleation of an MBE-grown epilayer atop, and through this, realise a true layer-by-layer growth mode. We further demonstrate the possibility of tuning the resulting growth dynamics via control of the species and dose of the plasma exposure.
format Preprint
id arxiv_https___arxiv_org_abs_2506_04388
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Substrate pre-sputtering for layer-by-layer van der Waals epitaxy of 2D materials
Rajan, A.
Ramirez, M.
Kushwaha, N.
Buchberger, S.
McLaren, M.
King, P. D. C.
Materials Science
Mesoscale and Nanoscale Physics
Two-dimensional transition metal chalcogenides, with their atomically layered structure, favourable electronic and mechanical properties, and often strong spin-orbit coupling, are ideal systems for fundamental studies and for applications ranging from spintronics to optoelectronics. Their bottom-up synthesis via epitaxial techniques such as molecular-beam epitaxy (MBE) has, however, proved challenging. Here, we develop a simple substrate pre-treatment process utilising exposure to a low-energy noble gas plasma. We show how this dramatically enhances nucleation of an MBE-grown epilayer atop, and through this, realise a true layer-by-layer growth mode. We further demonstrate the possibility of tuning the resulting growth dynamics via control of the species and dose of the plasma exposure.
title Substrate pre-sputtering for layer-by-layer van der Waals epitaxy of 2D materials
topic Materials Science
Mesoscale and Nanoscale Physics
url https://arxiv.org/abs/2506.04388