Machine learning for in-situ composition mapping in a self-driving magnetron sputtering system

Fuente: arXiv

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Bibliographic Details
Main Authors:	Jarl, Sanna, Sjölund, Jens, Frost, Robert J. W., Holst, Anders, Scragg, Jonathan J. S.
Format:	Preprint
Published:	2025
Subjects:	Machine Learning Materials Science I.2.1; J.2.8
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2506.05999