Buchumschlag

Surrogate models to optimize plasma assisted atomic layer deposition in high aspect ratio features

Fuente: arXiv

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Bibliographische Detailangaben
Hauptverfasser:	Yanguas-Gil, Angel, Elam, Jeffrey W.
Format:	Preprint
Veröffentlicht:	2025
Schlagworte:	Materials Science Machine Learning Plasma Physics
Online-Zugang:	Acceder al recurso
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

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