Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)
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arXiv
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| Main Authors: | , , |
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| Format: | Preprint |
| Published: |
2025
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| _version_ | 1866908405776515072 |
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| author | Bhattacharya, Indrani Petz, Marcus Tutsch, Rainer |
| author_facet | Bhattacharya, Indrani Petz, Marcus Tutsch, Rainer |
| contents | We present a simple and novel technique for interferometric surface measurement using a Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) as phase shifter and wavefront-compensator simultaneously. In comparison to a mechanical piezo-based phase shifter measurement, speed and measurement range can be increased by this approach. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2506_10602 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) Bhattacharya, Indrani Petz, Marcus Tutsch, Rainer Optics We present a simple and novel technique for interferometric surface measurement using a Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) as phase shifter and wavefront-compensator simultaneously. In comparison to a mechanical piezo-based phase shifter measurement, speed and measurement range can be increased by this approach. |
| title | Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) |
| topic | Optics |
| url | https://arxiv.org/abs/2506.10602 |