Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)

Fuente: arXiv
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Autores principales: Bhattacharya, Indrani, Petz, Marcus, Tutsch, Rainer
Formato: Preprint
Publicado: 2025
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author Bhattacharya, Indrani
Petz, Marcus
Tutsch, Rainer
author_facet Bhattacharya, Indrani
Petz, Marcus
Tutsch, Rainer
contents We present a simple and novel technique for interferometric surface measurement using a Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) as phase shifter and wavefront-compensator simultaneously. In comparison to a mechanical piezo-based phase shifter measurement, speed and measurement range can be increased by this approach.
format Preprint
id arxiv_https___arxiv_org_abs_2506_10602
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)
Bhattacharya, Indrani
Petz, Marcus
Tutsch, Rainer
Optics
We present a simple and novel technique for interferometric surface measurement using a Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM) as phase shifter and wavefront-compensator simultaneously. In comparison to a mechanical piezo-based phase shifter measurement, speed and measurement range can be increased by this approach.
title Phase shifting Interferometry and Wavefront Compensation using Liquid Crystal on Silicon (LCOS) Spatial Light Modulator (SLM)
topic Optics
url https://arxiv.org/abs/2506.10602