Free-Space Characterization Setup for Low-loss Aluminum Oxide Waveguides at 261 nm

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Main Authors: Voskerchyan, Vahram, Bonneville, Dawson, Chang, Lantian, Blanco, S. M. Garcia
Format: Preprint
Published: 2025
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author Voskerchyan, Vahram
Bonneville, Dawson
Chang, Lantian
Blanco, S. M. Garcia
author_facet Voskerchyan, Vahram
Bonneville, Dawson
Chang, Lantian
Blanco, S. M. Garcia
contents We present a methodology for the characterization of deep-ultraviolet (UV) photonic integrated circuits (UV-PICs) based on polycrystalline Al2O3, operating at a wavelength of 261 nm. The platform enables low-loss propagation in the deep UV, and we demonstrate an image-based analysis pipeline for estimating waveguide attenuation using free-space coupling and scattered-light imaging. The characterization approach combines spatial calibration of the imaging system, background analysis, and controlled exposure conditions to extract the exponential decay of scattered light along the propagation direction. Preliminary measurements suggest propagation losses on the order of 4.6 dB/cm for 600 nm wide waveguides, while narrower waveguides exhibit higher attenuation due to increased scattering and reduced mode confinement. This work primarily documents the experimental setup and analysis methodology used for deep-UV characterization, providing a foundation for further validation and refinement of propagation-loss measurements in integrated photonic devices operating in the deep-ultraviolet regime.
format Preprint
id arxiv_https___arxiv_org_abs_2506_13227
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Free-Space Characterization Setup for Low-loss Aluminum Oxide Waveguides at 261 nm
Voskerchyan, Vahram
Bonneville, Dawson
Chang, Lantian
Blanco, S. M. Garcia
Optics
Applied Physics
We present a methodology for the characterization of deep-ultraviolet (UV) photonic integrated circuits (UV-PICs) based on polycrystalline Al2O3, operating at a wavelength of 261 nm. The platform enables low-loss propagation in the deep UV, and we demonstrate an image-based analysis pipeline for estimating waveguide attenuation using free-space coupling and scattered-light imaging. The characterization approach combines spatial calibration of the imaging system, background analysis, and controlled exposure conditions to extract the exponential decay of scattered light along the propagation direction. Preliminary measurements suggest propagation losses on the order of 4.6 dB/cm for 600 nm wide waveguides, while narrower waveguides exhibit higher attenuation due to increased scattering and reduced mode confinement. This work primarily documents the experimental setup and analysis methodology used for deep-UV characterization, providing a foundation for further validation and refinement of propagation-loss measurements in integrated photonic devices operating in the deep-ultraviolet regime.
title Free-Space Characterization Setup for Low-loss Aluminum Oxide Waveguides at 261 nm
topic Optics
Applied Physics
url https://arxiv.org/abs/2506.13227