Integrated microheater on the 4H-silicon-carbide-on-insulator platform and its applications
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| Format: | Preprint |
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2025
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| _version_ | 1866911010861875200 |
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| author | Sun, Wenhan Wang, Ruixuan Li, Jingwei Zhang, Haipeng Jia, Zhensheng Li, Qing |
| author_facet | Sun, Wenhan Wang, Ruixuan Li, Jingwei Zhang, Haipeng Jia, Zhensheng Li, Qing |
| contents | Recent progress in the 4H-silicon-carbide-on-insulator (4H-SiCOI) platform has resulted in the demonstration of essential building blocks such as low-loss waveguides and microresonators. In this work, we add tunability to the 4H-SiCOI platform by integrating microheaters with compact microresonators. The strong thermo-optic effect in SiC enables a resonance tuning rate of $11.7$ pm/mW for a 36-$μ$m-radius SiC microring, with a maximum wavelength shift up to $2.4$ nm (300 GHz). The thermal time constant of the microheater is estimated near 7 $μ$s, corresponding to a 3-dB electrical bandwidth of 40 kHz. As a demonstration of potential applications, we employ the microheater to perform fast thermo-optic scans to deterministically access the single-soliton state of a 36-$μ$m-radius microcomb source. In addition, an add-drop filter based on an over-coupled 18-$μ$m-radius SiC microring is combined with the microcomb source for the selective filtering of individual comb lines, featuring an approximate 3-dB bandwidth of 5 GHz and an insertion loss of less than 1 dB. With such demonstrations, our work brings the much-needed tunability and reconfigurability to the 4H-SiCOI platform, paving the way for a wealth of chip-scale applications. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2506_15035 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Integrated microheater on the 4H-silicon-carbide-on-insulator platform and its applications Sun, Wenhan Wang, Ruixuan Li, Jingwei Zhang, Haipeng Jia, Zhensheng Li, Qing Optics Applied Physics Recent progress in the 4H-silicon-carbide-on-insulator (4H-SiCOI) platform has resulted in the demonstration of essential building blocks such as low-loss waveguides and microresonators. In this work, we add tunability to the 4H-SiCOI platform by integrating microheaters with compact microresonators. The strong thermo-optic effect in SiC enables a resonance tuning rate of $11.7$ pm/mW for a 36-$μ$m-radius SiC microring, with a maximum wavelength shift up to $2.4$ nm (300 GHz). The thermal time constant of the microheater is estimated near 7 $μ$s, corresponding to a 3-dB electrical bandwidth of 40 kHz. As a demonstration of potential applications, we employ the microheater to perform fast thermo-optic scans to deterministically access the single-soliton state of a 36-$μ$m-radius microcomb source. In addition, an add-drop filter based on an over-coupled 18-$μ$m-radius SiC microring is combined with the microcomb source for the selective filtering of individual comb lines, featuring an approximate 3-dB bandwidth of 5 GHz and an insertion loss of less than 1 dB. With such demonstrations, our work brings the much-needed tunability and reconfigurability to the 4H-SiCOI platform, paving the way for a wealth of chip-scale applications. |
| title | Integrated microheater on the 4H-silicon-carbide-on-insulator platform and its applications |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2506.15035 |