Subthreshold Swing Behavior in Amorphous Indium-Gallium-Zinc-Oxide Transistors from Room to Cryogenic Temperatures

Fuente: arXiv
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Main Authors: Tang, Hongwei, Belmonte, Attilio, Lin, Dennis, Zhao, Ying, Beckers, Arnout, Verdonck, Patrick, Dekkers, Harold, Subhechha, Subhali, van Setten, Michiel, Chen, Zhuo, Kar, Gouri Sankar, Van Houdt, Jan, Afanas'ev, Valeri
Format: Preprint
Published: 2025
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author Tang, Hongwei
Belmonte, Attilio
Lin, Dennis
Zhao, Ying
Beckers, Arnout
Verdonck, Patrick
Dekkers, Harold
Subhechha, Subhali
van Setten, Michiel
Chen, Zhuo
Kar, Gouri Sankar
Van Houdt, Jan
Afanas'ev, Valeri
author_facet Tang, Hongwei
Belmonte, Attilio
Lin, Dennis
Zhao, Ying
Beckers, Arnout
Verdonck, Patrick
Dekkers, Harold
Subhechha, Subhali
van Setten, Michiel
Chen, Zhuo
Kar, Gouri Sankar
Van Houdt, Jan
Afanas'ev, Valeri
contents While cryogenic-temperature subthreshold swing (SS) in crystalline semiconductors has been widely studied, a careful study on the temperature-dependent SS in amorphous oxide semiconductors remains lacking. In this paper, a comprehensive analysis of the SS in thin-film transistors with an amorphous indium gallium zinc oxide (IGZO) channel at temperatures from 300 K down to 4 K is presented. Main observations include: 1) At room temperature (300 K), the devices exhibit a SS of 61 mV/dec, and a low interface trap density (<1011 cm-2), among the best reported values for IGZO devices. 2) A SS saturation around 40 mV/dec is observed between 200 K and 100 K. It is well explained by the electron transport via band tail states with exponential decay (Wt) of 13 meV. 3) At deep-cryogenic temperature, SS increase significantly exceeding 200 mV/dec at 4 K. Such high SS values are actually limited by the measurement current range, confirmed by Id-Vg simulations based on the variable range hopping (VRH) model. This work not only elucidates the SS behavior in amorphous IGZO devices but also provides a deep understanding of the physical mechanisms of electron transport in amorphous semiconductors.
format Preprint
id arxiv_https___arxiv_org_abs_2506_15238
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Subthreshold Swing Behavior in Amorphous Indium-Gallium-Zinc-Oxide Transistors from Room to Cryogenic Temperatures
Tang, Hongwei
Belmonte, Attilio
Lin, Dennis
Zhao, Ying
Beckers, Arnout
Verdonck, Patrick
Dekkers, Harold
Subhechha, Subhali
van Setten, Michiel
Chen, Zhuo
Kar, Gouri Sankar
Van Houdt, Jan
Afanas'ev, Valeri
Materials Science
Applied Physics
While cryogenic-temperature subthreshold swing (SS) in crystalline semiconductors has been widely studied, a careful study on the temperature-dependent SS in amorphous oxide semiconductors remains lacking. In this paper, a comprehensive analysis of the SS in thin-film transistors with an amorphous indium gallium zinc oxide (IGZO) channel at temperatures from 300 K down to 4 K is presented. Main observations include: 1) At room temperature (300 K), the devices exhibit a SS of 61 mV/dec, and a low interface trap density (<1011 cm-2), among the best reported values for IGZO devices. 2) A SS saturation around 40 mV/dec is observed between 200 K and 100 K. It is well explained by the electron transport via band tail states with exponential decay (Wt) of 13 meV. 3) At deep-cryogenic temperature, SS increase significantly exceeding 200 mV/dec at 4 K. Such high SS values are actually limited by the measurement current range, confirmed by Id-Vg simulations based on the variable range hopping (VRH) model. This work not only elucidates the SS behavior in amorphous IGZO devices but also provides a deep understanding of the physical mechanisms of electron transport in amorphous semiconductors.
title Subthreshold Swing Behavior in Amorphous Indium-Gallium-Zinc-Oxide Transistors from Room to Cryogenic Temperatures
topic Materials Science
Applied Physics
url https://arxiv.org/abs/2506.15238