Domain Adaptation for Image Classification of Defects in Semiconductor Manufacturing

Fuente: arXiv
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Main Authors: Poniatowski, Adrian, Gentner, Natalie, Barusco, Manuel, Pezze, Davide Dalle, Salti, Samuele, Susto, Gian Antonio
Format: Preprint
Published: 2025
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author Poniatowski, Adrian
Gentner, Natalie
Barusco, Manuel
Pezze, Davide Dalle
Salti, Samuele
Susto, Gian Antonio
author_facet Poniatowski, Adrian
Gentner, Natalie
Barusco, Manuel
Pezze, Davide Dalle
Salti, Samuele
Susto, Gian Antonio
contents In the semiconductor sector, due to high demand but also strong and increasing competition, time to market and quality are key factors in securing significant market share in various application areas. Thanks to the success of deep learning methods in recent years in the computer vision domain, Industry 4.0 and 5.0 applications, such as defect classification, have achieved remarkable success. In particular, Domain Adaptation (DA) has proven highly effective since it focuses on using the knowledge learned on a (source) domain to adapt and perform effectively on a different but related (target) domain. By improving robustness and scalability, DA minimizes the need for extensive manual re-labeling or re-training of models. This not only reduces computational and resource costs but also allows human experts to focus on high-value tasks. Therefore, we tested the efficacy of DA techniques in semi-supervised and unsupervised settings within the context of the semiconductor field. Moreover, we propose the DBACS approach, a CycleGAN-inspired model enhanced with additional loss terms to improve performance. All the approaches are studied and validated on real-world Electron Microscope images considering the unsupervised and semi-supervised settings, proving the usefulness of our method in advancing DA techniques for the semiconductor field.
format Preprint
id arxiv_https___arxiv_org_abs_2506_15260
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Domain Adaptation for Image Classification of Defects in Semiconductor Manufacturing
Poniatowski, Adrian
Gentner, Natalie
Barusco, Manuel
Pezze, Davide Dalle
Salti, Samuele
Susto, Gian Antonio
Computer Vision and Pattern Recognition
Artificial Intelligence
In the semiconductor sector, due to high demand but also strong and increasing competition, time to market and quality are key factors in securing significant market share in various application areas. Thanks to the success of deep learning methods in recent years in the computer vision domain, Industry 4.0 and 5.0 applications, such as defect classification, have achieved remarkable success. In particular, Domain Adaptation (DA) has proven highly effective since it focuses on using the knowledge learned on a (source) domain to adapt and perform effectively on a different but related (target) domain. By improving robustness and scalability, DA minimizes the need for extensive manual re-labeling or re-training of models. This not only reduces computational and resource costs but also allows human experts to focus on high-value tasks. Therefore, we tested the efficacy of DA techniques in semi-supervised and unsupervised settings within the context of the semiconductor field. Moreover, we propose the DBACS approach, a CycleGAN-inspired model enhanced with additional loss terms to improve performance. All the approaches are studied and validated on real-world Electron Microscope images considering the unsupervised and semi-supervised settings, proving the usefulness of our method in advancing DA techniques for the semiconductor field.
title Domain Adaptation for Image Classification of Defects in Semiconductor Manufacturing
topic Computer Vision and Pattern Recognition
Artificial Intelligence
url https://arxiv.org/abs/2506.15260