CFD Modelling and Sensitivity-Guided Design of Silicon Filament CVD Reactors

Fuente: arXiv

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Bibliographic Details
Main Authors:	Gakis, G. P., Loachamín-Suntaxi, G., Aviziotis, I. G., Koronaki, E. D., Filippatos, P. P., Chatzigiannakis, G., Bordas, S. P. A., Davazoglou, D., Boudouvis, A. G.
Format:	Preprint
Published:	2025
Subjects:	Applied Physics Fluid Dynamics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2506.18889