CFD Modelling and Sensitivity-Guided Design of Silicon Filament CVD Reactors
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arXiv
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| Main Authors: | Gakis, G. P., Loachamín-Suntaxi, G., Aviziotis, I. G., Koronaki, E. D., Filippatos, P. P., Chatzigiannakis, G., Bordas, S. P. A., Davazoglou, D., Boudouvis, A. G. |
|---|---|
| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
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