Integrated optomechanical ultrasonic sensors with nano-Pascal-level sensitivity
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arXiv
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| Main Authors: | , , , , , , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| _version_ | 1866909659863973888 |
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| author | Cao, Xuening Yang, Hao Wang, Min Hu, Zhi-Gang Wu, Zu-Lei Wang, Yuanlei Liu, Jian-Fei Zhou, Xin Li, Jincheng Lao, Chenghao Yang, Qi-Fan Li, Bei-Bei |
| author_facet | Cao, Xuening Yang, Hao Wang, Min Hu, Zhi-Gang Wu, Zu-Lei Wang, Yuanlei Liu, Jian-Fei Zhou, Xin Li, Jincheng Lao, Chenghao Yang, Qi-Fan Li, Bei-Bei |
| contents | Ultrasonic sensors are widely used for object detection and localization in underwater and biological settings. The operational range and spatial resolution are inherently limited by sensor sensitivity, in which conventional piezoelectric transducers have been overwhelmed by advanced photonic sensors. Here, we demonstrate an optomechanical ultrasonic sensor integrated into a photonic platform, which comprises a suspended SiO2 membrane embedded with a high-Q Si3N4 microring resonator. By exploiting simultaneous optical and mechanical resonances, the sensor achieves a record low noise-equivalent pressure (NEP) of 218 nPa/Hz^1/2 at 289 kHz in air and 9.6 nPa/Hz^1/2 at 52 kHz in water. We demonstrate its versatility through photoacoustic gas spectroscopy in air and underwater ultrasound imaging, achieving a minimum detectable C2H2 concentration of 2.9 ppm (integration time 1 s) and an imaging resolution of 1.89 mm, respectively. Our work represents a significant advancement in compact CMOS-compatible ultrasound sensing, unlocking new possibilities in biomedical imaging, environmental monitoring, industrial testing, and underwater communications. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2506_20219 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Integrated optomechanical ultrasonic sensors with nano-Pascal-level sensitivity Cao, Xuening Yang, Hao Wang, Min Hu, Zhi-Gang Wu, Zu-Lei Wang, Yuanlei Liu, Jian-Fei Zhou, Xin Li, Jincheng Lao, Chenghao Yang, Qi-Fan Li, Bei-Bei Optics Instrumentation and Detectors Ultrasonic sensors are widely used for object detection and localization in underwater and biological settings. The operational range and spatial resolution are inherently limited by sensor sensitivity, in which conventional piezoelectric transducers have been overwhelmed by advanced photonic sensors. Here, we demonstrate an optomechanical ultrasonic sensor integrated into a photonic platform, which comprises a suspended SiO2 membrane embedded with a high-Q Si3N4 microring resonator. By exploiting simultaneous optical and mechanical resonances, the sensor achieves a record low noise-equivalent pressure (NEP) of 218 nPa/Hz^1/2 at 289 kHz in air and 9.6 nPa/Hz^1/2 at 52 kHz in water. We demonstrate its versatility through photoacoustic gas spectroscopy in air and underwater ultrasound imaging, achieving a minimum detectable C2H2 concentration of 2.9 ppm (integration time 1 s) and an imaging resolution of 1.89 mm, respectively. Our work represents a significant advancement in compact CMOS-compatible ultrasound sensing, unlocking new possibilities in biomedical imaging, environmental monitoring, industrial testing, and underwater communications. |
| title | Integrated optomechanical ultrasonic sensors with nano-Pascal-level sensitivity |
| topic | Optics Instrumentation and Detectors |
| url | https://arxiv.org/abs/2506.20219 |