Scalable and Tunable In-Plane Ge/Si(001) Nanowires Grown by Molecular Beam Epitaxy

Fuente: arXiv
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Main Authors: Wang, Jian-Huan, Ming, Ming, Huang, Ding-Ming, Zhang, Jie-Yin, Luo, Yi, Fu, Bin-Xiao, Chu, Yi-Xin, Yao, Yuan, Xu, Hongqi, Zhang, Jian-Jun
Format: Preprint
Published: 2025
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author Wang, Jian-Huan
Ming, Ming
Huang, Ding-Ming
Zhang, Jie-Yin
Luo, Yi
Fu, Bin-Xiao
Chu, Yi-Xin
Yao, Yuan
Xu, Hongqi
Zhang, Jian-Jun
author_facet Wang, Jian-Huan
Ming, Ming
Huang, Ding-Ming
Zhang, Jie-Yin
Luo, Yi
Fu, Bin-Xiao
Chu, Yi-Xin
Yao, Yuan
Xu, Hongqi
Zhang, Jian-Jun
contents Germanium nanostructures offer significant potential in developing advanced integrated circuit and disruptive quantum technologies, yet achieving both scalability and high carrier mobility remains a challenge in materials science. Here, we report an original low-temperature epitaxial method for growth of site-controlled in-plane germanium nanowires with high hole mobility by molecular beam epitaxy. By reducing the growth temperature, we effectively suppress Si-Ge interdiffusion, ensuring pure germanium composition within the nanowires while preserving their high crystalline quality. The method employs pre-patterned ridges on strain-relaxed Si$_{0.75}$Ge$_{0.25}$/Si(001) substrates as tailored templates, enabling control over the position, length, spacing and cross-sectional shape of the nanowires. Electrical measurements of field-effect devices made from as-grown germanium nanowires show that the nanowires are of hole conduction with mobility exceeding 7000 cm$^{2}$/Vs at 2-20 K. The method paves a way for fabrication of scalable germanium nanowire networks, providing a reliable platform for the developments of high-performance nanoelectronics and multi-qubit chips.
format Preprint
id arxiv_https___arxiv_org_abs_2506_20465
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Scalable and Tunable In-Plane Ge/Si(001) Nanowires Grown by Molecular Beam Epitaxy
Wang, Jian-Huan
Ming, Ming
Huang, Ding-Ming
Zhang, Jie-Yin
Luo, Yi
Fu, Bin-Xiao
Chu, Yi-Xin
Yao, Yuan
Xu, Hongqi
Zhang, Jian-Jun
Mesoscale and Nanoscale Physics
Materials Science
Germanium nanostructures offer significant potential in developing advanced integrated circuit and disruptive quantum technologies, yet achieving both scalability and high carrier mobility remains a challenge in materials science. Here, we report an original low-temperature epitaxial method for growth of site-controlled in-plane germanium nanowires with high hole mobility by molecular beam epitaxy. By reducing the growth temperature, we effectively suppress Si-Ge interdiffusion, ensuring pure germanium composition within the nanowires while preserving their high crystalline quality. The method employs pre-patterned ridges on strain-relaxed Si$_{0.75}$Ge$_{0.25}$/Si(001) substrates as tailored templates, enabling control over the position, length, spacing and cross-sectional shape of the nanowires. Electrical measurements of field-effect devices made from as-grown germanium nanowires show that the nanowires are of hole conduction with mobility exceeding 7000 cm$^{2}$/Vs at 2-20 K. The method paves a way for fabrication of scalable germanium nanowire networks, providing a reliable platform for the developments of high-performance nanoelectronics and multi-qubit chips.
title Scalable and Tunable In-Plane Ge/Si(001) Nanowires Grown by Molecular Beam Epitaxy
topic Mesoscale and Nanoscale Physics
Materials Science
url https://arxiv.org/abs/2506.20465