Hougs, N. B., Knudsen, K. S., Albrechtsen, M., Suhara, T., Rosiek, C. A., & Stobbe, S. (2025). Measurements, simulations, and models of the point-spread function of electron-beam lithography.
Cita Chicago Style (17a ed.)Hougs, Nikolaj B., Kristian S. Knudsen, Marcus Albrechtsen, Taichi Suhara, Christian A. Rosiek, y Søren Stobbe. Measurements, Simulations, and Models of the Point-spread Function of Electron-beam Lithography. 2025.
Cita MLA (9a ed.)Hougs, Nikolaj B., et al. Measurements, Simulations, and Models of the Point-spread Function of Electron-beam Lithography. 2025.
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