Wurtzite AlScN/AlN Superlattice Ferroelectrics Enable Endurance Beyond 1010 Cycles

Fuente: arXiv
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Main Authors: Wang, Ruiqing, Zhu, Feng, Qian, Haoji, Zhou, Jiuren, Sun, Wenxin, Zheng, Siying, Chen, Jiajia, Li, Bochang, Liu, Yan, Zhou, Peng, Hao, Yue, Han, Genquan
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Published: 2025
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author Wang, Ruiqing
Zhu, Feng
Qian, Haoji
Zhou, Jiuren
Sun, Wenxin
Zheng, Siying
Chen, Jiajia
Li, Bochang
Liu, Yan
Zhou, Peng
Hao, Yue
Han, Genquan
author_facet Wang, Ruiqing
Zhu, Feng
Qian, Haoji
Zhou, Jiuren
Sun, Wenxin
Zheng, Siying
Chen, Jiajia
Li, Bochang
Liu, Yan
Zhou, Peng
Hao, Yue
Han, Genquan
contents Wurtzite ferroelectrics are rapidly emerging as a promising material class for next-generation non-volatile memory technologies, owing to their large remanent polarization, intrinsically ordered three-dimensional crystal structure, and full compatibility with CMOS processes and back-end-of-line (BEOL) integration. However, their practical implementation remains critically constrained by a severe endurance bottleneck: under conditions where the remanent polarization (2Pr) reaches or exceeds 200 uC/cm^2, devices typically undergo catastrophic failure before reaching 10^8 cycles. Here, we report a vacancy-confining superlattice strategy that addresses this limitation, achieving reliable ferroelectric switching beyond 10^10 cycles while preserving saturated polarization (2Pr >= 200 uC/cm^2). This is achieved by embedding periodic ultrathin AlN layers within AlScN films, forming wurtzite AlScN/AlN superlattices, in conjunction with a dynamic recovery protocol that actively stabilizes the defect landscape throughout repeated cycling. Atomic-resolution imaging and EELS spectrum imaging technique, supported by first-principles calculations, reveal a self-regulated defect topology in which nitrogen vacancies are spatially confined by heterostructure energy barriers and dynamically re-trapped into energetically favorable lattice sites. This dual spatial-energetic confinement mechanism effectively inhibits both long-range percolative migration and local defect clustering, enabling such an ultrahigh endurance exceeding 10^10 cycles and limiting polarization degradation to below 3% after 10^9 cycles. These findings establish nitrogen vacancy topology stabilization as a foundational design principle for reliable operation of wurtzite ferroelectrics, providing a scalable and CMOS-compatible platform for future high-endurance ferroelectric memory technologies.
format Preprint
id arxiv_https___arxiv_org_abs_2506_22212
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Wurtzite AlScN/AlN Superlattice Ferroelectrics Enable Endurance Beyond 1010 Cycles
Wang, Ruiqing
Zhu, Feng
Qian, Haoji
Zhou, Jiuren
Sun, Wenxin
Zheng, Siying
Chen, Jiajia
Li, Bochang
Liu, Yan
Zhou, Peng
Hao, Yue
Han, Genquan
Materials Science
Applied Physics
Wurtzite ferroelectrics are rapidly emerging as a promising material class for next-generation non-volatile memory technologies, owing to their large remanent polarization, intrinsically ordered three-dimensional crystal structure, and full compatibility with CMOS processes and back-end-of-line (BEOL) integration. However, their practical implementation remains critically constrained by a severe endurance bottleneck: under conditions where the remanent polarization (2Pr) reaches or exceeds 200 uC/cm^2, devices typically undergo catastrophic failure before reaching 10^8 cycles. Here, we report a vacancy-confining superlattice strategy that addresses this limitation, achieving reliable ferroelectric switching beyond 10^10 cycles while preserving saturated polarization (2Pr >= 200 uC/cm^2). This is achieved by embedding periodic ultrathin AlN layers within AlScN films, forming wurtzite AlScN/AlN superlattices, in conjunction with a dynamic recovery protocol that actively stabilizes the defect landscape throughout repeated cycling. Atomic-resolution imaging and EELS spectrum imaging technique, supported by first-principles calculations, reveal a self-regulated defect topology in which nitrogen vacancies are spatially confined by heterostructure energy barriers and dynamically re-trapped into energetically favorable lattice sites. This dual spatial-energetic confinement mechanism effectively inhibits both long-range percolative migration and local defect clustering, enabling such an ultrahigh endurance exceeding 10^10 cycles and limiting polarization degradation to below 3% after 10^9 cycles. These findings establish nitrogen vacancy topology stabilization as a foundational design principle for reliable operation of wurtzite ferroelectrics, providing a scalable and CMOS-compatible platform for future high-endurance ferroelectric memory technologies.
title Wurtzite AlScN/AlN Superlattice Ferroelectrics Enable Endurance Beyond 1010 Cycles
topic Materials Science
Applied Physics
url https://arxiv.org/abs/2506.22212