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Development of an Atomic Layer Deposition System for Deposition of Alumina as a Hydrogen Permeation Barrier

Fuente: arXiv
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Bibliographic Details
Main Authors: Robinson, Zachary R., Woodward, Jeffrey, Kozen, Alexander C., Ruby, Joshua, Liao, Tyler, Herter, Luke, Ahmadov, Rashad, Wittman, Mark D., Sharpe, Matthew
Format: Preprint
Published: 2025
Subjects:
Materials Science
Online Access:
Acceder al recurso
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