Cover Image

Development of an Atomic Layer Deposition System for Deposition of Alumina as a Hydrogen Permeation Barrier

Fuente: arXiv

Saved in:

Bibliographic Details
Main Authors:	Robinson, Zachary R., Woodward, Jeffrey, Kozen, Alexander C., Ruby, Joshua, Liao, Tyler, Herter, Luke, Ahmadov, Rashad, Wittman, Mark D., Sharpe, Matthew
Format:	Preprint
Published:	2025
Subjects:	Materials Science
Online Access:	Acceder al recurso
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Formation Characteristics of Pt‐Ni Alloy Nanoparticles Fabricated by Nanolamination of Atomic Layer Deposition in Hydrogen
by: Ming‐Wei Liao, et al.
Published: (2024)

Enhancing Broadband Antireflection Performance of Silicon Solar Cells Using Grass‐Like Alumina via Atomic Layer Deposition
by: Jiahui Xu, et al.
Published: (2026)

Chapter Spatial Atomic Layer Deposition
by: Jiménez, Carmen, et al.
Published: (2021)

Integrating Multiple Functional Components into Active Ensembles by Atomic Layer Deposition for Efficient Hydrogen Conversion and CO Tolerance
by: Jiaye Qiu, et al.
Published: (2025)

18‐2: Efficient Methodology for Increasing Atomic Layer Deposition Throughput by Optimizing Deposition Rate of SiO2 Film
by: Tao Wang, et al.
Published: (2025)

Simulation of Atomic Layer Deposition with a Quantum Computer
by: Plekhanov, Evgeny, et al.
Published: (2025)

Atomic Layer Deposition of Molybdenum Carbide Thin Films
by: Paloma Ruiz Kärkkäinen, et al.
Published: (2024)

Ru‐Based Catalysts Deposited by Atomic Layer Deposition for Non‐Alkaline Zn‐Air Batteries
by: Amit Ohayon, et al.
Published: (2025)

Matthew LeeAnderson, Confidence in Life: A Barthian Account of Procreation. Enquiries in Theological Ethics. London: T&T Clark, 2024, 272pp. $115
by: Tyler R. Wittman
Published: (2025)

Water Vapor Permeation in Alumina Films on Polymer Substrates
by: Zhuoting Cai, et al.
Published: (2024)

Are There High-Density Deep States in AtomicLayer-Deposited IGZO Thin Film?
by: Zheng, Liankai, et al.
Published: (2025)

Engineering Metastability in Atomic Layer Deposition: Polymorph and Valence Control
by: Jihoon Jeon, et al.
Published: (2026)

Atomic Layer Deposition in Transistors and Monolithic 3D Integration
by: Yue Liu, et al.
Published: (2026)

Atomic Layer Deposition Films for Resistive Random‐Access Memories
by: Chunxue Hao, et al.
Published: (2024)

Temperature-Dependent Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition for Tunnel Barriers in Josephson Junctions
by: Bhatia, Ekta, et al.
Published: (2026)

Universal Exponential Barrier Sensitivity in Heterogeneous Complex Systems (EBS)
by: Ahmadov, Murad
Published: (2026)

WSe2 p-MOSFETs with Nb-Doped WS2 Contacts Deposited using Atomic Layer Deposition
by: Mishra, Shivanshu, et al.
Published: (2025)

Fluidized Bed Chemical Vapor Deposition of Copper on Micronic Alumina Powders
by: Ilyass Jellal, et al.
Published: (2024)

Effect of La Spatial Uniformity on Ferroelectric Properties of HfO2 Films Deposited by Atomic Layer Deposition Method
by: Juyoung Jeong, et al.
Published: (2024)

Optimizing Atomic Layer Deposition Processes with Nanowire‐Assisted TEM Analysis
by: Peter Schweizer, et al.
Published: (2024)

Atomic Layer Deposition of Hafnium Oxide Passivating Layers on Silicon: Impact of Precursor Selection
by: Sophie L. Pain, et al.
Published: (2024)

Residual Stress Development in Lattice Mismatched Epitaxial Thin Films via Atomic and Molecular Layer Depositions
by: Galib, Musanna, et al.
Published: (2024)

Tuning Electrochemical Performance of Graphenated Carbon Nanotubes Through Atomic Layer Deposition of TiO 2
by: Carlos R. Rambo, et al.
Published: (2025)

4‐3: Silicon‐Oxide Thin Films Deposited by Plasma‐Enhanced Atomic Layer Deposition for High Mobility Oxide TFT
by: Heeyong Lee, et al.
Published: (2025)

Structure Properties Correlations on Nickel‐Iron Oxide Catalysts Deposited by Atomic Layer Deposition for the Oxygen Evolution Reaction in Alkaline Media
by: Estelle Jozwiak, et al.
Published: (2024)

Innovative Photocatalyst Design: Advancing ZnO/MIL‐100(Fe) through Atomic Layer Deposition in Hydrogen Evolution
by: Seyed Parsa Amouzesh, et al.
Published: (2024)

Physical Strategies for Geometric Control of Transition Metal Dichalcogenide Atomic Layers by Chemical Vapor Deposition
by: Jing Yi Tee, et al.
Published: (2024)

Low Temperature Atomic Layer Deposition of (00l)‐Oriented Elemental Bismuth
by: Jorge Luis Vazquez‐Arce, et al.
Published: (2025)

Mechatronic Spatial Atomic Layer Deposition for Closed‐Loop and Customizable Process Control
by: Daniel Penley, et al.
Published: (2024)

Semiconductor-like Optical Properties Unveiled by Modeling of Short-Period Aluminum Oxide-Copper Multi-Layered Nanocomposites Deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)
by: Tornøe, Søren A., et al.
Published: (2022)

Bifunctional Mn‐Fe Oxide Catalysts for Zn‐Air Battery Air Electrodes Fabricated Through Atomic Layer Deposition
by: Matthew Labbe, et al.
Published: (2024)

A Review on Reactor Design and Surface Modification of Atomic Layer Deposition for Functional Nanoparticles
by: Guanghui Yan, et al.
Published: (2025)

Advanced Fabrication of Ultrathin Ruthenium Films Using Synergistic Atomic Layer Deposition and Etching
by: Jeongbin Lee, et al.
Published: (2025)

Constructing Conductive MoOx Thin Films by Plasma‐Enhanced Atomic Layer Deposition
by: Ling Zhou, et al.
Published: (2024)

Performance Degradation and Protective Effects of Atomic Layer Deposition for Mg‐based Thermoelectric Modules
by: Pingjun Ying, et al.
Published: (2024)

Improved Molybdenum Dioxide Atomic Layer Deposition Process by Introducing Pre‐Reduction Agent
by: Soo Min Yoo, et al.
Published: (2026)

Area‐Selective Atomic Layer Deposition on Homogeneous Substrate for Next‐Generation Electronic Devices
by: Min‐Jeong Rhee, et al.
Published: (2025)

Electronic Modification at Atomic Scale: Design and Preparation of Diatomic Structures by Atomic Layer Deposition for Methanol Steam Reforming
by: Jinqiu Guo, et al.
Published: (2025)

Ultra‐High Mobility Atomically‐Ordered InGaZnO Transistors Through Atomic Layer Deposition
by: Yoon‐Seo Kim, et al.
Published: (2025)

Atomic Layer Deposition of Aluminum Phosphorus Oxynitride and Its Application as a Passivation Layer on Aluminum Metal Anode
by: Li Tao, et al.
Published: (2025)