The impact of process steps on nearly ideal subthreshold slope in 300-mm compatible InGaZnO TFT

Fuente: arXiv

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Bibliographic Details
Main Authors:	Tang, Hongwei, Lin, Dennis, Subhechha, Subhali, Chasin, Adrian, Matsubayashi, Daisuke, van Setten, Michiel, Wan, Yiqun, Dekkers, Harold, Li, Jie, Subramanian, Shruthi, Chen, Zhuo, Rassoul, Nouredine, Jiang, Yuchao, Van Houdt, Jan, Afanas`ev, Valeri, Kar, Gouri Sankar, Belmonte, Attilio
Format:	Preprint
Published:	2025
Subjects:	Applied Physics Materials Science
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2507.01901