Physics-informed neural networks and neural operators for a study of EUV electromagnetic wave diffraction from a lithography mask

Fuente: arXiv

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Bibliographic Details
Main Authors:	Es'kin, Vasiliy A., Ivanov, Egor V.
Format:	Preprint
Published:	2025
Subjects:	Numerical Analysis Artificial Intelligence Machine Learning Computational Physics Optics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2507.04153