Deep Learning to Automate Parameter Extraction and Model Fitting of Two-Dimensional Transistors

Fuente: arXiv
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Main Authors: Bennett, Robert K. A., Uslu, Jan-Lucas, Gault, Harmon F., Khan, Asir Intisar, Hoang, Lauren, Peña, Tara, Neilson, Kathryn, Song, Young Suh, Zhang, Zhepeng, Mannix, Andrew J., Pop, Eric
Format: Preprint
Published: 2025
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author Bennett, Robert K. A.
Uslu, Jan-Lucas
Gault, Harmon F.
Khan, Asir Intisar
Hoang, Lauren
Peña, Tara
Neilson, Kathryn
Song, Young Suh
Zhang, Zhepeng
Mannix, Andrew J.
Pop, Eric
author_facet Bennett, Robert K. A.
Uslu, Jan-Lucas
Gault, Harmon F.
Khan, Asir Intisar
Hoang, Lauren
Peña, Tara
Neilson, Kathryn
Song, Young Suh
Zhang, Zhepeng
Mannix, Andrew J.
Pop, Eric
contents We present a deep learning approach to extract physical parameters (e.g., mobility, Schottky contact barrier height, defect profiles) of two-dimensional (2D) transistors from electrical measurements, enabling automated parameter extraction and technology computer-aided design (TCAD) fitting. To facilitate this task, we implement a simple data augmentation and pre-training approach by training a secondary neural network to approximate a physics-based device simulator. This method enables high-quality fits after training the neural network on electrical data generated from physics-based simulations of ~500 devices, a factor >40$\times$ fewer than other recent efforts. Consequently, fitting can be achieved by training on physically rigorous TCAD models, including complex geometry, self-consistent transport, and electrostatic effects, and is not limited to computationally inexpensive compact models. We apply our approach to reverse-engineer key parameters from experimental monolayer WS$_2$ transistors, achieving a median coefficient of determination ($R^2$) = 0.99 when fitting measured electrical data. We also demonstrate that this approach generalizes and scales well by reverse-engineering electrical data on high-electron-mobility transistors while fitting 35 parameters simultaneously. To facilitate future research on deep learning approaches for inverse transistor design, we have published our code and sample data sets online.
format Preprint
id arxiv_https___arxiv_org_abs_2507_05134
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Deep Learning to Automate Parameter Extraction and Model Fitting of Two-Dimensional Transistors
Bennett, Robert K. A.
Uslu, Jan-Lucas
Gault, Harmon F.
Khan, Asir Intisar
Hoang, Lauren
Peña, Tara
Neilson, Kathryn
Song, Young Suh
Zhang, Zhepeng
Mannix, Andrew J.
Pop, Eric
Machine Learning
Materials Science
Applied Physics
We present a deep learning approach to extract physical parameters (e.g., mobility, Schottky contact barrier height, defect profiles) of two-dimensional (2D) transistors from electrical measurements, enabling automated parameter extraction and technology computer-aided design (TCAD) fitting. To facilitate this task, we implement a simple data augmentation and pre-training approach by training a secondary neural network to approximate a physics-based device simulator. This method enables high-quality fits after training the neural network on electrical data generated from physics-based simulations of ~500 devices, a factor >40$\times$ fewer than other recent efforts. Consequently, fitting can be achieved by training on physically rigorous TCAD models, including complex geometry, self-consistent transport, and electrostatic effects, and is not limited to computationally inexpensive compact models. We apply our approach to reverse-engineer key parameters from experimental monolayer WS$_2$ transistors, achieving a median coefficient of determination ($R^2$) = 0.99 when fitting measured electrical data. We also demonstrate that this approach generalizes and scales well by reverse-engineering electrical data on high-electron-mobility transistors while fitting 35 parameters simultaneously. To facilitate future research on deep learning approaches for inverse transistor design, we have published our code and sample data sets online.
title Deep Learning to Automate Parameter Extraction and Model Fitting of Two-Dimensional Transistors
topic Machine Learning
Materials Science
Applied Physics
url https://arxiv.org/abs/2507.05134