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| Main Authors: | , , , , , , , , |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2507.05993 |
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| _version_ | 1866915377619927040 |
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| author | Ma, Yintao Chen, Yao Yu, Mingzhi Wang, Yanbin Guo, Ju Yang, Ping Lin, Qijing Lv, Yang Zhao, Libo |
| author_facet | Ma, Yintao Chen, Yao Yu, Mingzhi Wang, Yanbin Guo, Ju Yang, Ping Lin, Qijing Lv, Yang Zhao, Libo |
| contents | The most appealing features of chip-scale quantum sensors are their capability to maintain extreme sensitivity while enabling large-scale batch manufacturing. This necessitates high-level integration and wafer-level fabrication of atomic vapor cells. In this paper, we describe a micromachining paradigm for wafer-level atomic vapor cells functionalized by CMOS-compatible non-magnetic heaters and temperature sensors and demonstrate several innovative applications. Leveraging standard micro-nanofabrication technology, the integrated vapor cells achieved an ultra-long optical access of 5 mm, nearly four time that of previously microfabricated vapor cells. The feasibility of the integrated atomic vapor cells fabrication process was verified by a consecutive 30-day aging test in a harsh environment (operating temperature of 473 K and vacuum of approximately 1 Pa). Benefiting from the ultra-long optical path, we observed several typical quantum effects, including the saturation absorption and spin fluctuations, a regime previously inaccessible with conventional micromachined vapor cells. Finally, a zero-field quantum magnetometry with an ultra-high magnetic sensitivity of 12 fT/Hz1/2 was also demonstrated. Our achievements broaden the potential applications of microfabricated atomic vapor cells and pave the way for scalable manufacturing of ultrasensitive, chip-scale quantum sensors. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2507_05993 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | COMS-Integrated Atomic Vapor Cells with Ultra-long Optical Access for Highly Sensitive and Scalable Quantum Sensors Ma, Yintao Chen, Yao Yu, Mingzhi Wang, Yanbin Guo, Ju Yang, Ping Lin, Qijing Lv, Yang Zhao, Libo Quantum Physics The most appealing features of chip-scale quantum sensors are their capability to maintain extreme sensitivity while enabling large-scale batch manufacturing. This necessitates high-level integration and wafer-level fabrication of atomic vapor cells. In this paper, we describe a micromachining paradigm for wafer-level atomic vapor cells functionalized by CMOS-compatible non-magnetic heaters and temperature sensors and demonstrate several innovative applications. Leveraging standard micro-nanofabrication technology, the integrated vapor cells achieved an ultra-long optical access of 5 mm, nearly four time that of previously microfabricated vapor cells. The feasibility of the integrated atomic vapor cells fabrication process was verified by a consecutive 30-day aging test in a harsh environment (operating temperature of 473 K and vacuum of approximately 1 Pa). Benefiting from the ultra-long optical path, we observed several typical quantum effects, including the saturation absorption and spin fluctuations, a regime previously inaccessible with conventional micromachined vapor cells. Finally, a zero-field quantum magnetometry with an ultra-high magnetic sensitivity of 12 fT/Hz1/2 was also demonstrated. Our achievements broaden the potential applications of microfabricated atomic vapor cells and pave the way for scalable manufacturing of ultrasensitive, chip-scale quantum sensors. |
| title | COMS-Integrated Atomic Vapor Cells with Ultra-long Optical Access for Highly Sensitive and Scalable Quantum Sensors |
| topic | Quantum Physics |
| url | https://arxiv.org/abs/2507.05993 |