Monolithic interferometric modules for multi-axis coordinate positioning with sub-nanometre precision
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arXiv
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| Auteurs principaux: | , , , , |
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| Format: | Preprint |
| Publié: |
2025
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| _version_ | 1866916837110841344 |
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| author | Rerucha, Simon Cip, Ondrej Hola, Miroslava Lazar, Josef Mikel, Bretislav |
| author_facet | Rerucha, Simon Cip, Ondrej Hola, Miroslava Lazar, Josef Mikel, Bretislav |
| contents | We report on developing, characterizing, and verifying a compact, monolithic laser interferometric assembly designed for high-precision two- and three-axis displacement measurements in coordinate positioning systems. The design targets OEM integration into advanced precision motion platforms, including nanometrology instruments, semiconductor manufacturing equipment, and ultra-high vacuum (UHV) environments. Using a single laser source, the assembly integrates multiple interferometers into a monolithic L-shaped base frame, enabling sub-nanometer periodic error in X-Y motion systems while minimizing geometric and thermal instabilities. The pre-aligned and pre-adjusted architecture simplifies integration, enhances long-term stability, and ensures consistent metrological performance. The system's verification protocol employs quadrature phase analysis and systematic error metrics to characterize performance and optimise assembly. The results indicate sub-nanometer measurement capability and suggest the system's suitability for scalable implementation in advanced coordinate metrology applications. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2507_07642 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Monolithic interferometric modules for multi-axis coordinate positioning with sub-nanometre precision Rerucha, Simon Cip, Ondrej Hola, Miroslava Lazar, Josef Mikel, Bretislav Optics Applied Physics Instrumentation and Detectors We report on developing, characterizing, and verifying a compact, monolithic laser interferometric assembly designed for high-precision two- and three-axis displacement measurements in coordinate positioning systems. The design targets OEM integration into advanced precision motion platforms, including nanometrology instruments, semiconductor manufacturing equipment, and ultra-high vacuum (UHV) environments. Using a single laser source, the assembly integrates multiple interferometers into a monolithic L-shaped base frame, enabling sub-nanometer periodic error in X-Y motion systems while minimizing geometric and thermal instabilities. The pre-aligned and pre-adjusted architecture simplifies integration, enhances long-term stability, and ensures consistent metrological performance. The system's verification protocol employs quadrature phase analysis and systematic error metrics to characterize performance and optimise assembly. The results indicate sub-nanometer measurement capability and suggest the system's suitability for scalable implementation in advanced coordinate metrology applications. |
| title | Monolithic interferometric modules for multi-axis coordinate positioning with sub-nanometre precision |
| topic | Optics Applied Physics Instrumentation and Detectors |
| url | https://arxiv.org/abs/2507.07642 |