Improving Transmon Qubit Performance with Fluorine-based Surface Treatments

Fuente: arXiv
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Hauptverfasser: Gingras, Michael A., Niedzielski, Bethany M., Grossklaus, Kevin A., Miller, Duncan, Contipelli, Felipe, Azar, Kate, Burkhart, Luke D., Calusine, Gregory, Davis, Daniel, Piñero, Renée DePencier, Gertler, Jeffrey M., Hazard, Thomas M., Hirjibehedin, Cyrus F., Kim, David K., Knecht, Jeffrey M., Melville, Alexander J., O'Connell, Christopher, Rood, Robert A., Sabbah, Ali, Stickler, Hannah, Yoder, Jonilyn L., Oliver, William D., Schwartz, Mollie E., Serniak, Kyle
Format: Preprint
Veröffentlicht: 2025
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author Gingras, Michael A.
Niedzielski, Bethany M.
Grossklaus, Kevin A.
Miller, Duncan
Contipelli, Felipe
Azar, Kate
Burkhart, Luke D.
Calusine, Gregory
Davis, Daniel
Piñero, Renée DePencier
Gertler, Jeffrey M.
Hazard, Thomas M.
Hirjibehedin, Cyrus F.
Kim, David K.
Knecht, Jeffrey M.
Melville, Alexander J.
O'Connell, Christopher
Rood, Robert A.
Sabbah, Ali
Stickler, Hannah
Yoder, Jonilyn L.
Oliver, William D.
Schwartz, Mollie E.
Serniak, Kyle
author_facet Gingras, Michael A.
Niedzielski, Bethany M.
Grossklaus, Kevin A.
Miller, Duncan
Contipelli, Felipe
Azar, Kate
Burkhart, Luke D.
Calusine, Gregory
Davis, Daniel
Piñero, Renée DePencier
Gertler, Jeffrey M.
Hazard, Thomas M.
Hirjibehedin, Cyrus F.
Kim, David K.
Knecht, Jeffrey M.
Melville, Alexander J.
O'Connell, Christopher
Rood, Robert A.
Sabbah, Ali
Stickler, Hannah
Yoder, Jonilyn L.
Oliver, William D.
Schwartz, Mollie E.
Serniak, Kyle
contents Reducing materials and processing-induced decoherence is critical to the development of utility-scale quantum processors based on superconducting qubits. Here we report on the impact of two fluorine-based wet etches, which we use to treat the silicon surface underneath the Josephson junctions (JJs) of fixed-frequency transmon qubits made with aluminum base metallization. Using several materials analysis techniques, we demonstrate that these surface treatments can remove germanium residue introduced by our JJ fabrication with no other changes to the overall process flow. These surface treatments result in significantly improved energy relaxation times for the highest performing process, with median $T_1=334~μ$s, corresponding to quality factor $Q=6.6\times10^6$. This result suggests that the metal-substrate interface directly underneath the JJs was a major contributor to microwave loss in these transmon qubit circuits prior to integration of these surface treatments. Furthermore, this work illustrates how materials analysis can be used in conjunction with quantum device performance metrics to improve performance in superconducting qubits.
format Preprint
id arxiv_https___arxiv_org_abs_2507_08089
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Improving Transmon Qubit Performance with Fluorine-based Surface Treatments
Gingras, Michael A.
Niedzielski, Bethany M.
Grossklaus, Kevin A.
Miller, Duncan
Contipelli, Felipe
Azar, Kate
Burkhart, Luke D.
Calusine, Gregory
Davis, Daniel
Piñero, Renée DePencier
Gertler, Jeffrey M.
Hazard, Thomas M.
Hirjibehedin, Cyrus F.
Kim, David K.
Knecht, Jeffrey M.
Melville, Alexander J.
O'Connell, Christopher
Rood, Robert A.
Sabbah, Ali
Stickler, Hannah
Yoder, Jonilyn L.
Oliver, William D.
Schwartz, Mollie E.
Serniak, Kyle
Quantum Physics
Mesoscale and Nanoscale Physics
Materials Science
Reducing materials and processing-induced decoherence is critical to the development of utility-scale quantum processors based on superconducting qubits. Here we report on the impact of two fluorine-based wet etches, which we use to treat the silicon surface underneath the Josephson junctions (JJs) of fixed-frequency transmon qubits made with aluminum base metallization. Using several materials analysis techniques, we demonstrate that these surface treatments can remove germanium residue introduced by our JJ fabrication with no other changes to the overall process flow. These surface treatments result in significantly improved energy relaxation times for the highest performing process, with median $T_1=334~μ$s, corresponding to quality factor $Q=6.6\times10^6$. This result suggests that the metal-substrate interface directly underneath the JJs was a major contributor to microwave loss in these transmon qubit circuits prior to integration of these surface treatments. Furthermore, this work illustrates how materials analysis can be used in conjunction with quantum device performance metrics to improve performance in superconducting qubits.
title Improving Transmon Qubit Performance with Fluorine-based Surface Treatments
topic Quantum Physics
Mesoscale and Nanoscale Physics
Materials Science
url https://arxiv.org/abs/2507.08089