Modeling the Role of Secondary Electron Emission in Direct Current Magnetron Sputtering using Explicit Energy-Conserving Particle-in-Cell Methods

Fuente: arXiv
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Bibliographic Details
Main Authors: Main, Daniel, Jenkins, Thomas G., Theis, Joseph G., Werner, Gregory R., Cary, John R., Lanham, Eve, Veitzer, Seth A., Kruger, Scott E.
Format: Preprint
Published: 2025
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