Physics-Informed Neural Networks For Semiconductor Film Deposition: A Review

Fuente: arXiv

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Bibliographic Details
Main Authors:	Han, Tao, Taheri, Zahra, Ko, Hyunwoong
Format:	Preprint
Published:	2025
Subjects:	Machine Learning
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2507.10983