Chemical vapor deposition synthesis of (GeTe)n(Sb2Te3) gradient crystalline films as promising planar heterostructures

Fuente: arXiv
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Autores principales: Zhezhu, M., Vasil'ev, A., Yapryntsev, M., Ghalumyan, E., Ghazaryan, D. A., Gharagulyan, H.
Formato: Preprint
Publicado: 2025
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author Zhezhu, M.
Vasil'ev, A.
Yapryntsev, M.
Ghalumyan, E.
Ghazaryan, D. A.
Gharagulyan, H.
author_facet Zhezhu, M.
Vasil'ev, A.
Yapryntsev, M.
Ghalumyan, E.
Ghazaryan, D. A.
Gharagulyan, H.
contents Phase-change materials of the (GeTe)n (Sb2Te3) (GST) system are of high relevance in memory storage and energy conversion applications due to their fast-switching speed, high data retention, and tunable properties. Here, we report on a fast and efficient CVD-based method for the fabrication of crystalline GST films with variable Ge/Sb atomic content. In particular, the approach enables compositional control without changing the precursor, facilitating a gradient synthesis of Ge3Sb2Te6, Ge2Sb2Te5, and GeSb2Te4 phases in a single attempt. The analyses of their structural, optical, and electrical aspects highlight how compositional variation influences the film's properties. Our findings demonstrate a straightforward approach enabling the preparation of gradient crystalline GST films with tunable morphology and functionality. These gradient films can potentially provide in-plane multilevel and gradual switching thresholds for memory applications and altered refractive index and absorption for optical modulation and filtering applications.
format Preprint
id arxiv_https___arxiv_org_abs_2507_12888
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Chemical vapor deposition synthesis of (GeTe)n(Sb2Te3) gradient crystalline films as promising planar heterostructures
Zhezhu, M.
Vasil'ev, A.
Yapryntsev, M.
Ghalumyan, E.
Ghazaryan, D. A.
Gharagulyan, H.
Materials Science
Phase-change materials of the (GeTe)n (Sb2Te3) (GST) system are of high relevance in memory storage and energy conversion applications due to their fast-switching speed, high data retention, and tunable properties. Here, we report on a fast and efficient CVD-based method for the fabrication of crystalline GST films with variable Ge/Sb atomic content. In particular, the approach enables compositional control without changing the precursor, facilitating a gradient synthesis of Ge3Sb2Te6, Ge2Sb2Te5, and GeSb2Te4 phases in a single attempt. The analyses of their structural, optical, and electrical aspects highlight how compositional variation influences the film's properties. Our findings demonstrate a straightforward approach enabling the preparation of gradient crystalline GST films with tunable morphology and functionality. These gradient films can potentially provide in-plane multilevel and gradual switching thresholds for memory applications and altered refractive index and absorption for optical modulation and filtering applications.
title Chemical vapor deposition synthesis of (GeTe)n(Sb2Te3) gradient crystalline films as promising planar heterostructures
topic Materials Science
url https://arxiv.org/abs/2507.12888