A superinductor in a deep sub-micron integrated circuit
Fuente:
arXiv
Saved in:
| Main Authors: | , , , , , , , , , |
|---|---|
| Format: | Preprint |
| Published: |
2025
|
| Subjects: | |
| Online Access: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1866918201872351232 |
|---|---|
| author | Swift, T. H. Olivieri, F. Aizpurua-Iraola, G. Kirkman, J. Noah, G. M. de Kruijf, M. von Horstig, F. E. Gomez-Saiz, A. Morton, J. J. L. Gonzalez-Zalba, M. F. |
| author_facet | Swift, T. H. Olivieri, F. Aizpurua-Iraola, G. Kirkman, J. Noah, G. M. de Kruijf, M. von Horstig, F. E. Gomez-Saiz, A. Morton, J. J. L. Gonzalez-Zalba, M. F. |
| contents | Superinductors are circuit elements characterised by an intrinsic impedance in excess of the superconducting resistance quantum ($R_\text{Q}\approx6.45~$k$Ω$), with applications from metrology and sensing to quantum computing. However, they are typically obtained using exotic materials with high density inductance such as Josephson junctions, superconducting nanowires or twisted two-dimensional materials. Here, we present a superinductor realised within a silicon integrated circuit (IC), exploiting the high kinetic inductance ($\sim 1$~nH/$\square$) of TiN thin films native to the manufacturing process (22-nm FDSOI). By interfacing the superinductor to a silicon quantum dot formed within the same IC, we demonstrate a radio-frequency single-electron transistor (rfSET), the most widely used sensor in semiconductor-based quantum computers. The integrated nature of the rfSET reduces its parasitics which, together with the high impedance, yields a sensitivity improvement of more than two orders of magnitude over the state-of-the-art, combined with a 10,000-fold area reduction. Beyond providing the basis for dense arrays of integrated and high-performance qubit sensors, the realization of high-kinetic-inductance superconducting devices integrated within modern silicon ICs opens many opportunities, including kinetic-inductance detector arrays for astronomy and the study of metamaterials and quantum simulators based on 1D and 2D resonator arrays. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2507_13202 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | A superinductor in a deep sub-micron integrated circuit Swift, T. H. Olivieri, F. Aizpurua-Iraola, G. Kirkman, J. Noah, G. M. de Kruijf, M. von Horstig, F. E. Gomez-Saiz, A. Morton, J. J. L. Gonzalez-Zalba, M. F. Quantum Physics Mesoscale and Nanoscale Physics Superconductivity Superinductors are circuit elements characterised by an intrinsic impedance in excess of the superconducting resistance quantum ($R_\text{Q}\approx6.45~$k$Ω$), with applications from metrology and sensing to quantum computing. However, they are typically obtained using exotic materials with high density inductance such as Josephson junctions, superconducting nanowires or twisted two-dimensional materials. Here, we present a superinductor realised within a silicon integrated circuit (IC), exploiting the high kinetic inductance ($\sim 1$~nH/$\square$) of TiN thin films native to the manufacturing process (22-nm FDSOI). By interfacing the superinductor to a silicon quantum dot formed within the same IC, we demonstrate a radio-frequency single-electron transistor (rfSET), the most widely used sensor in semiconductor-based quantum computers. The integrated nature of the rfSET reduces its parasitics which, together with the high impedance, yields a sensitivity improvement of more than two orders of magnitude over the state-of-the-art, combined with a 10,000-fold area reduction. Beyond providing the basis for dense arrays of integrated and high-performance qubit sensors, the realization of high-kinetic-inductance superconducting devices integrated within modern silicon ICs opens many opportunities, including kinetic-inductance detector arrays for astronomy and the study of metamaterials and quantum simulators based on 1D and 2D resonator arrays. |
| title | A superinductor in a deep sub-micron integrated circuit |
| topic | Quantum Physics Mesoscale and Nanoscale Physics Superconductivity |
| url | https://arxiv.org/abs/2507.13202 |