Low loss monolithic barium titanate on insulator integrated photonics with intrinsic quality factor >1 million
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| Format: | Preprint |
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2025
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| _version_ | 1866915413003075584 |
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| author | Kim, Gwan In Yim, Jieun Bahl, Gaurav |
| author_facet | Kim, Gwan In Yim, Jieun Bahl, Gaurav |
| contents | Barium titanate (BTO) has been experiencing a surge of interest for integrated photonics technologies because of its large nonlinear optical coefficients, especially the Pockels coefficient, and in part due to newly available thin-film substrates. In this work, we report on the development of a redeposition-free dry etching technique for monolithic BTO-on-insulator photonics, that produces very low-roughness and high-verticality waveguides. Using this, we experimentally demonstrate the first BTO microresonators with intrinsic Q-factor $> 1$ million, and waveguide propagation loss as small as 0.32 dB/cm, representing the lowest losses reported in any BTO-based integrated platform to date. We additionally demonstrate Mach-Zehnder amplitude modulators with $V_πL = 0.54$ V$\cdot$cm and effective electro-optic coefficient $r_\text{eff} = 162$ pm/V. |
| format | Preprint |
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arxiv_https___arxiv_org_abs_2507_17150 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Low loss monolithic barium titanate on insulator integrated photonics with intrinsic quality factor >1 million Kim, Gwan In Yim, Jieun Bahl, Gaurav Optics Applied Physics Barium titanate (BTO) has been experiencing a surge of interest for integrated photonics technologies because of its large nonlinear optical coefficients, especially the Pockels coefficient, and in part due to newly available thin-film substrates. In this work, we report on the development of a redeposition-free dry etching technique for monolithic BTO-on-insulator photonics, that produces very low-roughness and high-verticality waveguides. Using this, we experimentally demonstrate the first BTO microresonators with intrinsic Q-factor $> 1$ million, and waveguide propagation loss as small as 0.32 dB/cm, representing the lowest losses reported in any BTO-based integrated platform to date. We additionally demonstrate Mach-Zehnder amplitude modulators with $V_πL = 0.54$ V$\cdot$cm and effective electro-optic coefficient $r_\text{eff} = 162$ pm/V. |
| title | Low loss monolithic barium titanate on insulator integrated photonics with intrinsic quality factor >1 million |
| topic | Optics Applied Physics |
| url | https://arxiv.org/abs/2507.17150 |