Low loss monolithic barium titanate on insulator integrated photonics with intrinsic quality factor >1 million

Fuente: arXiv
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Main Authors: Kim, Gwan In, Yim, Jieun, Bahl, Gaurav
Format: Preprint
Published: 2025
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author Kim, Gwan In
Yim, Jieun
Bahl, Gaurav
author_facet Kim, Gwan In
Yim, Jieun
Bahl, Gaurav
contents Barium titanate (BTO) has been experiencing a surge of interest for integrated photonics technologies because of its large nonlinear optical coefficients, especially the Pockels coefficient, and in part due to newly available thin-film substrates. In this work, we report on the development of a redeposition-free dry etching technique for monolithic BTO-on-insulator photonics, that produces very low-roughness and high-verticality waveguides. Using this, we experimentally demonstrate the first BTO microresonators with intrinsic Q-factor $> 1$ million, and waveguide propagation loss as small as 0.32 dB/cm, representing the lowest losses reported in any BTO-based integrated platform to date. We additionally demonstrate Mach-Zehnder amplitude modulators with $V_πL = 0.54$ V$\cdot$cm and effective electro-optic coefficient $r_\text{eff} = 162$ pm/V.
format Preprint
id arxiv_https___arxiv_org_abs_2507_17150
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Low loss monolithic barium titanate on insulator integrated photonics with intrinsic quality factor >1 million
Kim, Gwan In
Yim, Jieun
Bahl, Gaurav
Optics
Applied Physics
Barium titanate (BTO) has been experiencing a surge of interest for integrated photonics technologies because of its large nonlinear optical coefficients, especially the Pockels coefficient, and in part due to newly available thin-film substrates. In this work, we report on the development of a redeposition-free dry etching technique for monolithic BTO-on-insulator photonics, that produces very low-roughness and high-verticality waveguides. Using this, we experimentally demonstrate the first BTO microresonators with intrinsic Q-factor $> 1$ million, and waveguide propagation loss as small as 0.32 dB/cm, representing the lowest losses reported in any BTO-based integrated platform to date. We additionally demonstrate Mach-Zehnder amplitude modulators with $V_πL = 0.54$ V$\cdot$cm and effective electro-optic coefficient $r_\text{eff} = 162$ pm/V.
title Low loss monolithic barium titanate on insulator integrated photonics with intrinsic quality factor >1 million
topic Optics
Applied Physics
url https://arxiv.org/abs/2507.17150