Frequency comb generation in low-loss, low-stress, high-Q deuterated silicon nitride microring resonators in an 8-inch photonics platform

Fuente: arXiv
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Main Authors: Cao, Y., Chen, G. F., Lau, C., Tobing, L. Y. M., Jang, S. L. H., Tsang, Y. F., Yoo, J. O., Toh, Y. T., Goh, J. S., Lim, L. W., Wong, C. W., Ng, D. K. T., Tan, D. T. H., Luo, X.
Format: Preprint
Published: 2025
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author Cao, Y.
Chen, G. F.
Lau, C.
Tobing, L. Y. M.
Jang, S. L. H.
Tsang, Y. F.
Yoo, J. O.
Toh, Y. T.
Goh, J. S.
Lim, L. W.
Wong, C. W.
Ng, D. K. T.
Tan, D. T. H.
Luo, X.
author_facet Cao, Y.
Chen, G. F.
Lau, C.
Tobing, L. Y. M.
Jang, S. L. H.
Tsang, Y. F.
Yoo, J. O.
Toh, Y. T.
Goh, J. S.
Lim, L. W.
Wong, C. W.
Ng, D. K. T.
Tan, D. T. H.
Luo, X.
contents Systematic studies on different SiN films in terms of propagation losses are presented, and deuterated SiN emerges as a good candidate for ultralow loss (< 0.1 dB/cm) and reliability by simple 8-inch process with low thermal budget. Frequency comb generation in high-Q (~1 million) deuterated silicon nitride microring is demonstrated and used for intensity modulated direct detection transmission. Negligible power penalty for 25.78 GBaud/s NRZ and PAM4 is achieved at error rates <10-6, below the FEC limit.
format Preprint
id arxiv_https___arxiv_org_abs_2507_17287
institution arXiv
publishDate 2025
record_format arxiv
spellingShingle Frequency comb generation in low-loss, low-stress, high-Q deuterated silicon nitride microring resonators in an 8-inch photonics platform
Cao, Y.
Chen, G. F.
Lau, C.
Tobing, L. Y. M.
Jang, S. L. H.
Tsang, Y. F.
Yoo, J. O.
Toh, Y. T.
Goh, J. S.
Lim, L. W.
Wong, C. W.
Ng, D. K. T.
Tan, D. T. H.
Luo, X.
Optics
Applied Physics
Systematic studies on different SiN films in terms of propagation losses are presented, and deuterated SiN emerges as a good candidate for ultralow loss (< 0.1 dB/cm) and reliability by simple 8-inch process with low thermal budget. Frequency comb generation in high-Q (~1 million) deuterated silicon nitride microring is demonstrated and used for intensity modulated direct detection transmission. Negligible power penalty for 25.78 GBaud/s NRZ and PAM4 is achieved at error rates <10-6, below the FEC limit.
title Frequency comb generation in low-loss, low-stress, high-Q deuterated silicon nitride microring resonators in an 8-inch photonics platform
topic Optics
Applied Physics
url https://arxiv.org/abs/2507.17287