Copertina

Laser micromachining of arbitrarily complex and overhang-free SiN nanomechanical resonators

Fuente: arXiv

Salvato in:

Dettagli Bibliografici
Autori principali:	Saleh, Yahya, Louis-Seize, Zachary, Hodges, Timothy, Girard, David, Shakir, Mohammed, Turgeon-Roy, Mathis, Doyon-D'Amour, Francis, Zhang, Chang, Weck, Arnaud, St-Gelais, Raphael
Natura:	Preprint
Pubblicazione:	2025
Soggetti:	Optics Applied Physics
Accesso online:	Acceder al recurso
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