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| Main Authors: | , , |
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| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | https://arxiv.org/abs/2507.20824 |
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| _version_ | 1866911079781629952 |
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| author | Bütün, Mehmet Saltik, Alperen Tokel, Onur |
| author_facet | Bütün, Mehmet Saltik, Alperen Tokel, Onur |
| contents | Recent advances in three-dimensional laser writing have enabled direct nanostructuring deep within silicon, unlocking a volumetric design space previously inaccessible to surface-bound nanophotonic devices. Here, we introduce subwavelength phase engineering inside crystalline silicon, offering a novel strategy for integrated photonics. We design and numerically demonstrate a volumetric metaoptic monolithically embedded within the bulk, achieving full 2$π$ phase control at telecommunication wavelengths, with simulated transmission efficiencies reaching 90 %. The architecture is guided by a semi-analytical Fabry-Perot model and validated through full-wave simulations. Arrays of 250-nm-wide metaatoms spaced at 300-410 nm pitch yield a focusing efficiency of 70 %. With the wafer surface left pristine, this platform can potentially enable co-integration with electronics, MEMS/NEMS, and conventional metasurfaces. Moreover, the method is directly transferable to other transparent dielectrics compatible with ultrafast laser writing. These results establish a CMOS-compatible blueprint for three-dimensional nanophotonics and multi-level integration within the wafer. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2507_20824 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Subwavelength Phase Engineering Deep Inside Silicon Bütün, Mehmet Saltik, Alperen Tokel, Onur Optics Recent advances in three-dimensional laser writing have enabled direct nanostructuring deep within silicon, unlocking a volumetric design space previously inaccessible to surface-bound nanophotonic devices. Here, we introduce subwavelength phase engineering inside crystalline silicon, offering a novel strategy for integrated photonics. We design and numerically demonstrate a volumetric metaoptic monolithically embedded within the bulk, achieving full 2$π$ phase control at telecommunication wavelengths, with simulated transmission efficiencies reaching 90 %. The architecture is guided by a semi-analytical Fabry-Perot model and validated through full-wave simulations. Arrays of 250-nm-wide metaatoms spaced at 300-410 nm pitch yield a focusing efficiency of 70 %. With the wafer surface left pristine, this platform can potentially enable co-integration with electronics, MEMS/NEMS, and conventional metasurfaces. Moreover, the method is directly transferable to other transparent dielectrics compatible with ultrafast laser writing. These results establish a CMOS-compatible blueprint for three-dimensional nanophotonics and multi-level integration within the wafer. |
| title | Subwavelength Phase Engineering Deep Inside Silicon |
| topic | Optics |
| url | https://arxiv.org/abs/2507.20824 |