A Practical Finite Element Approach for Simulating Dynamic Crack Growth in Cu/Ultra Low-k Interconnect Structures
Fuente:
arXiv
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| Auteurs principaux: | , , , , |
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| Format: | Preprint |
| Publié: |
2025
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| _version_ | 1866918109482319872 |
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| author | Xie, Yuxi Wu, Ethan J. Xu, Lu Perez, Jimmy Li, Shaofan |
| author_facet | Xie, Yuxi Wu, Ethan J. Xu, Lu Perez, Jimmy Li, Shaofan |
| contents | This work presents a practical finite element modeling strategy, the Crack Element Method (CEM), for simulating the dynamic crack propagation in two-dimensional structures. The method employs an element-splitting algorithm based on the Edge-based Smoothed Finite Element Method (ES-FEM) to capture the element-wise crack growth while reducing the formation of poorly shaped elements that can compromise numerical accuracy and computational performance. A fracture energy release rate formulation is also developed based on the evolving topology of the split elements. The proposed approach is validated through a series of classical benchmark problems, demonstrating its accuracy and robustness in addressing dynamic fracture scenarios. Finally, the applicability of the CEM is illustrated in a case study involving patterned Cu/Ultra Low-k interconnect structures. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2508_00193 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | A Practical Finite Element Approach for Simulating Dynamic Crack Growth in Cu/Ultra Low-k Interconnect Structures Xie, Yuxi Wu, Ethan J. Xu, Lu Perez, Jimmy Li, Shaofan Computational Engineering, Finance, and Science Systems and Control This work presents a practical finite element modeling strategy, the Crack Element Method (CEM), for simulating the dynamic crack propagation in two-dimensional structures. The method employs an element-splitting algorithm based on the Edge-based Smoothed Finite Element Method (ES-FEM) to capture the element-wise crack growth while reducing the formation of poorly shaped elements that can compromise numerical accuracy and computational performance. A fracture energy release rate formulation is also developed based on the evolving topology of the split elements. The proposed approach is validated through a series of classical benchmark problems, demonstrating its accuracy and robustness in addressing dynamic fracture scenarios. Finally, the applicability of the CEM is illustrated in a case study involving patterned Cu/Ultra Low-k interconnect structures. |
| title | A Practical Finite Element Approach for Simulating Dynamic Crack Growth in Cu/Ultra Low-k Interconnect Structures |
| topic | Computational Engineering, Finance, and Science Systems and Control |
| url | https://arxiv.org/abs/2508.00193 |