A Practical Finite Element Approach for Simulating Dynamic Crack Growth in Cu/Ultra Low-k Interconnect Structures
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arXiv
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| Main Authors: | Xie, Yuxi, Wu, Ethan J., Xu, Lu, Perez, Jimmy, Li, Shaofan |
|---|---|
| Format: | Preprint |
| Published: |
2025
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| Subjects: | |
| Online Access: | |
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