A Novel Methodology of Visualizing Orthorhombic Phase Uniformity in Ferroelectric Hf0.5Zr0.5O2 Devices Using Piezoresponse Force Microscopy

Fuente: arXiv
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Bibliographic Details
Main Authors: Peng, Wei-Cheng, Liu, Hsien-Yang, Yu, Cheng-Yu, Useinov, Artur, Wu, Tian-Li
Format: Preprint
Published: 2025
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