Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation

Fuente: arXiv

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Bibliographic Details
Main Authors:	Shen, Yang, Song, Shangzhi, Chen, Tao, Zhang, Kexin, Chen, Yu, Zhao, Lu, Jiang, Puqing
Format:	Preprint
Published:	2025
Subjects:	Mesoscale and Nanoscale Physics
Online Access:	Acceder al recurso
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Internet

https://arxiv.org/abs/2508.07740