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Mechanistic Insight into BEOL Thermal Transport via Optical Metrology and Multiphysics Simulation

Fuente: arXiv

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Detalles Bibliográficos
Autores principales:	Shen, Yang, Song, Shangzhi, Chen, Tao, Zhang, Kexin, Chen, Yu, Zhao, Lu, Jiang, Puqing
Formato:	Preprint
Publicado:	2025
Materias:	Mesoscale and Nanoscale Physics
Acceso en línea:	Acceder al recurso
Etiquetas:	Agregar Etiqueta Sin Etiquetas, Sea el primero en etiquetar este registro!

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