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| Natura: | Preprint |
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2025
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| Accesso online: | https://arxiv.org/abs/2508.11775 |
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| _version_ | 1866915751616577536 |
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| author | Audri, Ahsanul Mohaimeen Ho, Chung-Ping Hollar, Emerson J. Shi, Jingjing Farzana, Esmat |
| author_facet | Audri, Ahsanul Mohaimeen Ho, Chung-Ping Hollar, Emerson J. Shi, Jingjing Farzana, Esmat |
| contents | This work presents electrothermal co-design of vertical \b{eta}-Ga2O3 Schottky barrier diodes (SBDs) to enhance both heat dissipation and high field management in high-power applications. Here, we demonstrate device-level thermal management tailored for two vertical \b{eta}-Ga2O3 SBD structures that employed different edge termination techniques, such as field-plate and deep etch with sidewall field-plate, where the field-plate was formed with high-permittivity dielectric (BaTiO3). The localized thermal hot spots were detected at the Schottky contact edges near BaTiO3 dielectric based field-plate. However, a substantial reduction of the thermal hotspots was observed by forming the field-plate with BaTiO3 and thermally-conductive AlN insulator, where the AlN can effectively decrease Joule heating at interface and the high permittivity of BaTiO3 contributes to high field reduction. The deep etch and sidewall field-plate SBD structure further reduced accumulated heat and electric field near the critical anode edge by removing lateral depletion regions. We also analyzed thermal transport at dielectric/\b{eta}-Ga2O3 interfaces using Landauer approach that revealed significantly higher thermal boundary conductance (TBC) enabled by AlN compared to BaTiO3, attesting to the superior heat dissipation ability by BaTiO3/AlN field-plate than the BaTiO3-only configuration. Experimental investigation with vertical metal/AlN/\b{eta}-Ga2O3 diodes also extracted a high breakdown field (~11 MV/cm) of AlN, significantly exceeding the material breakdown field of \b{eta}-Ga2O3. This indicates that AlN can be an excellent choice for field-plate dielectric in vertical \b{eta}-Ga2O3 SBDs to provide both enhanced high field sustainability and improved heat dissipation in high-power applications. |
| format | Preprint |
| id |
arxiv_https___arxiv_org_abs_2508_11775 |
| institution | arXiv |
| publishDate | 2025 |
| record_format | arxiv |
| spellingShingle | Electro-thermal Co-design of Vertical \b{eta}-Ga2O3 Schottky Diodes with High-permittivity BaTiO3 Field-plate for High-field and Thermal Management Audri, Ahsanul Mohaimeen Ho, Chung-Ping Hollar, Emerson J. Shi, Jingjing Farzana, Esmat Materials Science This work presents electrothermal co-design of vertical \b{eta}-Ga2O3 Schottky barrier diodes (SBDs) to enhance both heat dissipation and high field management in high-power applications. Here, we demonstrate device-level thermal management tailored for two vertical \b{eta}-Ga2O3 SBD structures that employed different edge termination techniques, such as field-plate and deep etch with sidewall field-plate, where the field-plate was formed with high-permittivity dielectric (BaTiO3). The localized thermal hot spots were detected at the Schottky contact edges near BaTiO3 dielectric based field-plate. However, a substantial reduction of the thermal hotspots was observed by forming the field-plate with BaTiO3 and thermally-conductive AlN insulator, where the AlN can effectively decrease Joule heating at interface and the high permittivity of BaTiO3 contributes to high field reduction. The deep etch and sidewall field-plate SBD structure further reduced accumulated heat and electric field near the critical anode edge by removing lateral depletion regions. We also analyzed thermal transport at dielectric/\b{eta}-Ga2O3 interfaces using Landauer approach that revealed significantly higher thermal boundary conductance (TBC) enabled by AlN compared to BaTiO3, attesting to the superior heat dissipation ability by BaTiO3/AlN field-plate than the BaTiO3-only configuration. Experimental investigation with vertical metal/AlN/\b{eta}-Ga2O3 diodes also extracted a high breakdown field (~11 MV/cm) of AlN, significantly exceeding the material breakdown field of \b{eta}-Ga2O3. This indicates that AlN can be an excellent choice for field-plate dielectric in vertical \b{eta}-Ga2O3 SBDs to provide both enhanced high field sustainability and improved heat dissipation in high-power applications. |
| title | Electro-thermal Co-design of Vertical \b{eta}-Ga2O3 Schottky Diodes with High-permittivity BaTiO3 Field-plate for High-field and Thermal Management |
| topic | Materials Science |
| url | https://arxiv.org/abs/2508.11775 |